Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring

Wei, Jia; Cui, Yue; Velden, Maja van der; Chen, Z.L.; Liu, Z.W.; Makinwa, Kofi A. A.; Sarro, P.M.

doi:10.1016/j.sna.2010.03.021

Cited by 33 publications

(21 citation statements)

References 21 publications

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“…Other non-polymeric-based sensor designs may have a lot faster response and recovery times, such as 2-5 ms reported in [17] and 500 ms in [18], but these sensor designs lack the critical capability of sensitivity and selectivity customization, and therefore can only be used for limited applications. As long as the application needs are fully met, the slower response and recovery time is a reasonable tradeoff for a low-cost, customizable, high-selectivity sensor platform as presented in this paper.…”

Section: Transient Response Analysismentioning

confidence: 99%

“…Most importantly, since the sensor design is of high simplicity and free of ADC, it is highly suitable for flexible devices for wearable epidermal sensing applications and novel RFresonant sensor array integration demonstrated in [16] to achieve the smallest possible sensor size and highest possible fabrication simplicity for low-cost, mass-producible, and disposable applications. Such advantages are even more evident when comparing our novel sensor design to various ultra-sensitive capacitive sensor and sensor system designs, such as the CMOS zeptofarad capacitive sensor [17], the femtofarad microfluidic sensor [18], and the quartz crystal-based mechanical resonant sensor [19,20].…”

Section: Introductionmentioning

confidence: 95%

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Novel undercoupled radio-frequency (RF) resonant sensor for gaseous ethanol and interferents detection

Chen¹,

Stewart²,

Mansour³

et al. 2015

Sensors and Actuators A: Physical

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Section: Transient Response Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 95%

Novel undercoupled radio-frequency (RF) resonant sensor for gaseous ethanol and interferents detection

Chen¹,

Stewart²,

Mansour³

et al. 2015

Sensors and Actuators A: Physical

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“…The second part of the noise is mainly generated by the amplifiers in the readout circuit. An effective way to suppress this electrical noise is to use a lock-in strategy to eliminate the influence of the flicker noise generated by the amplifier [30].…”

Section: A 1d Sensing Devicementioning

confidence: 99%

Integrated Piezoresistive Force and Position Detection Sensors for Micro-Handling Applications

Wei¹,

Porta

Tichem

et al. 2013

J. Microelectromech. Syst.

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This paper presents two integrated piezoresistive sensors capable of detecting simultaneously both the contact force and the contact position of a micro-object in micro-handling applications. The first sensor detects the 1-D contact position in vertical direction along a contact surface. The second sensor extends the sensing principle and detects the contact position on a 2-D contact surface. The devices combine the outputs of two groups of piezoresistors in Wheatstone bridge configurations, allowing the computation of the contact force and the contact position. The sensors are fabricated with an IC-compatible process and can be integrated in micro-handling tools such as micro-grippers. The two devices are characterized by applying forces onto the contact surface at pre-defined positions. With an applied contact force ∼1 mN, the first sensor has a force resolution of 1 µN and a vertical position detection accuracy of 2-3 µm. The estimated force range detectable is 3 mN and a sensitivity of 2.8 V/N is obtained with an effective supply voltage of 177 mV across the Wheatstone bridge. The second sensor has a force detection range up to 3 mN with a resolution of 20 µN under a measured noise of 30 µV. The theoretical spatial resolution is ∼5 µm in both x and y directions with a contact force of 1 mN. The devices are designed to handle micro-objects with sizes of 25-250 µm. The concept and the principle of the device are not limited to applications in micro-grippers and can be used in other micro-handling tools. [2012-0001]

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“…Balanced bridge was used by Wei et al with lock-in detection technique for pico liter liquid monitoring. They achieved 1 aF resolution in 100 Hz resolution [9]. AC based method was used by Marioli et al in a CMOS lab on a chip for single cell detection.…”

Section: Introductionmentioning

confidence: 99%

A compact microwave frequency reflectometer with attoFarad sensitivity: A path towards an integrated dielectrophoresis cytometer

Mohammad

Braasch

Salimi

et al. 2015

Sensors and Actuators A: Physical

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Design, fabrication and characterization of a femto-farad capacitive sensor for pico-liter liquid monitoring

Cited by 33 publications

References 21 publications

Novel undercoupled radio-frequency (RF) resonant sensor for gaseous ethanol and interferents detection

Novel undercoupled radio-frequency (RF) resonant sensor for gaseous ethanol and interferents detection

Integrated Piezoresistive Force and Position Detection Sensors for Micro-Handling Applications

A compact microwave frequency reflectometer with attoFarad sensitivity: A path towards an integrated dielectrophoresis cytometer

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