Design of a 5mW capacitive accelerometer based on MEMS and CMOS technology

Ruan, Yue; Ji, Lujun; Tang, Ying; Yao, Wenji; Wang, Zhangquan; Xu, Sen

doi:10.1109/wcica.2012.6359444

Cited by 3 publications

(3 citation statements)

References 7 publications

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“…As the spacing between parallel plates capacitors are very small, significant parasitic capacitance occurs between the parallel plate configurations [20]. The mathematical formula to calculate the parasitic plate capacitance is as available in literature [20] as given in equation (7). Where, x0 is the width of the electrode, h is the height of the electrode, d is the distance between electrode in the proof mass and electrode fixed on the static part.…”

Section: B Mathematical Modelingmentioning

confidence: 99%

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Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Raha Patra,

Biswas

2024

JICS

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The structural optimization of the device is used in the present work to demonstrate the improvement of the device sensitivity for a MEMS accelerometer based on capacitive principle due to overlap area change between electrodes. The proof mass of the device is made up of a few parallel fingers those are joined together. Proof mass is supported by flexible mechanical beams that resemble springs is suspended over fixed electrodes and are fastened to the substrate. The greatest displacement that the proof mass can suffer with application of acceleration is determined for the specific construction. The connected beams' width and length were changed, and ANSYS FEA software was used to model the reaction. Sensitivity of the device is analyzed and discussed based on the findings of various device geometry measurements, and suggestions for improving sensitivity are also made. Additionally, a signal conditioning circuit that changes the capacitance to voltage as a result of the proof mass deflecting differently is described. These discoveries might help designers to create capacitive MEMS accelerometers with increased sensitivity.

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Section: B Mathematical Modelingmentioning

confidence: 99%

“…There are several different kinds of acceleration sensors, including capacitive, piezoelectric, and piezoresistive ones. According to the device's operating principle, MEMS accelerometers may be classified as capacitive [6][7], piezoresistive [8], piezoelectric [9][10], optical [11], thermal [12], resonant etc.…”

Section: Introductionmentioning

confidence: 99%

Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Raha Patra,

Biswas

2024

JICS

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“…Such MEMS sensors are fabricated either in surface or bulk micromachining technology. These technologies can be compatible with existing VLSI production processes like CMOS or SiGe-BiCMOS and allow seamless combination with the readout circuit or even monolithic integration (Ruan et al, 2012;Wang et al, 2011;Rudolf et al, 2014).…”

Section: Introductionmentioning

confidence: 99%

An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS

Utz

Walk

Haas

et al. 2017

J. Sens. Sens. Syst.

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Abstract. In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS) sensors such as accelerometers, gyroscopes or pressure sensors. A flexible interface allows connection of a wide range of types of sensing elements. The ASIC (application-specific integrated circuit) was designed with a focus on ultra-low noise operation and high analog measurement performance. Theoretical considerations on system noise are presented which lead to design requirements affecting the reachable overall measurement performance. Special emphasis is put on the design of the fully differential operational amplifiers, as these have the dominant influence on the achievable overall performance. The measured input referred noise is below 50 zF/ √Hz within a bandwidth of 10 Hz to 10 kHz. Four adjustable gain settings allow the adaption to measurement ranges from ±750 fF to ±3 pF. This ensures compatibility with a wide range of sensor applications. The full input signal bandwidth ranges from 0 Hz to more than 50 kHz. A high-precision accelerometer system was built from the described ASIC and a high-sensitivity, low-noise sensor MEMS. The design of the MEMS is outlined and the overall system performance, which yields a combined noise floor of 200 ng/ √ Hz, is demonstrated. Finally, we show an application using the ASIC together with a CMOS integrated capacitive pressure sensor, which yields a measurement signal-to-noise ratio (SNR) of more than 100 dB.

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Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer

Kim²,

Choa

2022

Int. J. Precis. Eng. Manuf.

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Design of a 5mW capacitive accelerometer based on MEMS and CMOS technology

Cited by 3 publications

References 7 publications

Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS

Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer

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Design of a 5mW capacitive accelerometer based on MEMS and CMOS technology

Cited by 3 publications

References 7 publications

Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

Design and performance analysis of a MEMS Based Area-Variation Capacitive Accelerometer with Readout Circuit

An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 µm CMOS

Analysis of Temperature Stability and Change of Resonant Frequency of a Capacitive MEMS Accelerometer

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An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS