Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution

Xiao, Dingbang; Zhou, Xin; Li, Qingsong; Hou, Zhanqiang; Xi, Xiang; Wu, Yulie; Wu, Xuezhong

doi:10.1109/jmems.2016.2558197

Cited by 55 publications

(14 citation statements)

References 32 publications

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“…The energy dissipation caused by this conversion from mechanical energy to heat is defined as the TED. Zener’s standard model [ 25 , 26 ] is the most widely used theoretical model for TED, which is given by [ 18 ]

where C V is the heat capacity of the solid. E is the Young’s modulus.…”

Section: Device Descriptionmentioning

confidence: 99%

“…Owing to its high thermal stability, large modal mass, and many other advantages, the disk resonator is successfully used for high performance MEMS gyroscopes [ 6 , 7 , 21 ]. A lot of researches have been implemented to improve the performance of disk resonator [ 6 , 7 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 ]. One promising technique is to decouple the stiffness and mass of the disk resonator by adding lumped masses to the frame structure [ 28 , 29 ].…”

Section: Introductionmentioning

confidence: 99%

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Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

Zhou

Xiao

et al. 2018

Micromachines

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Quality factor is one of the most important parameters for a MEMS resonator. Most MEMS resonators are dominated by thermoelastic dissipation (TED). This paper demonstrates that the TED in a disk resonator that is made of (111) single-crystal silicon is surpassed by clamping loss. The stiffness-mass decoupling design method, combined with reducing the beam width, was used to engineer high QTED. Experiments show that Q of the (111) disk resonator have an upper boundary that is determined by the clamping loss caused by the unbalanced out-of-plane displacement. The origin of the out-of-plane displacement is explained by theory and simulation.

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where C V is the heat capacity of the solid. E is the Young’s modulus.…”

Section: Device Descriptionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

Zhou

Xiao

et al. 2018

Micromachines

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“…In our previous works [23], [24], the effect of the ring thickness distribution on the mechanical sensitivity of the DRG has been studied. In this section, further efforts have been made to study the comprehensive influences of the ring thicknesses on the sensitivity and the mechanical noise.…”

Section: A Overviewmentioning

confidence: 99%

Influences of the Structure Parameters on Sensitivity and Brownian Noise of the Disk Resonator Gyroscope

Zhou

Xiao

Hou

et al. 2017

J. Microelectromech. Syst.

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This paper presents a comprehensive investigation of the influences of the structure parameters on the sensitivity and Brownian noise of the disk resonator gyroscope (DRG). The mechanical sensitivity, transducer sensitivity, Brownian displacement, and Brownian noise floor of the DRG with varying structural parameters (including ring number, resonator diameter, structure height, and anchor size) are calculated based on the finite-element method (COMSOL Multiphysics). Each parameter is studied independently. Meanwhile, useful comparison between the DRG and the ring vibratory gyroscope is made, which indicates that the DRG has great advantages over the transducer sensitivity and Brownian noise. Last but not least, a multi-objective optimization method is used to design the ring thickness distribution of the DRG and an instructive ring thickness distribution designing rule is obtained. The preceding study can give an explicit guideline for designing all kinds of DRG and may also provide useful information for designing other micro gyroscopes. The multi-objective optimization method could be expanded to include other objectives, constraints, or variables relevant to all kinds of gyroscopes or other microelectromechanical systems devices.[ 2016-0136]Index Terms-Disk resonator gyroscope, microresonators, sensitivity, Brownian noise, structural design, multi-objective optimization.

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“…The Boeing company first proposed and implemented a compact planar micro-machined design [ 19 ]. Based on the fundamental deign, many valuable explorations have also been realized including optimized ring thickness distribution and quality factor enhancement [ 20 , 21 ].…”

Section: Introductionmentioning

confidence: 99%

A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes

Chen

et al. 2020

Sensors

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This paper proposes a solution for sensing spatial angular velocity. A high-performance digital interface application specific integrated circuit (ASIC) for triple-axis micro-electromechanical systems (MEMS) vibratory gyroscopes is presented. The technique of time multiplexing is employed for synergetic stable drive control and precise angular velocity measurement in three separate degrees of freedom (DOF). Self-excited digital closed loop drives the proof mass in sensing elements at its inherent resonant frequency for Coriolis force generation during angular rotation. The analog front ends in both drive and sense loops are comprised of low-noise charge-voltage (C/V) converters and multi-channel incremental zoom analog-to-digital converters (ADC), so that capacitance variation between combs induced by mechanical motion is transformed into digital voltage signals. Other circuitry elements, such as loop controlling and accurate demodulation modules, are all implemented in digital logics. Automatic amplitude stabilization is mainly realized by peak detection and proportion-integration (PI) control. Nonlinear digital gain adjustment is designed for rapid establishment of resonance oscillation and linearity improvement. Manufactured in a standard 0.35-μm complementary metal-oxide-semiconductor (CMOS) technology, this design achieves a bias instability of 2.1°/h and a nonlinearity of 0.012% over full-scale range.

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Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution

Cited by 55 publications

References 32 publications

Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

Influences of the Structure Parameters on Sensitivity and Brownian Noise of the Disk Resonator Gyroscope

A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes

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