Design of electromagnetic induction type MEMS motor with multilayer ceramic three-dimensional coil

Takato, Minami; Yokozeki, Yuji; Mishima, K.; Han, Yanshuo; Saito, Ken; Uchikoba, Fumio

doi:10.1109/icep.2016.7486859

Cited by 3 publications

(1 citation statement)

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“…For micromotors, solenoid iron-core microcoils not only provide a higher inductance density, but also help establish a low-resistance magnetic circuit. Takato et al [22] proposed an axial-flux PM micromotor with 3D solenoid microcoils with magnetic ceramic cores.…”

Section: Introductionmentioning

confidence: 99%

A Radial-flux Permanent Magnet Micromotor with 3D Solenoid Iron-core MEMS In-chip Coils of High Aspect Ratio

Tao

Sun

et al. 2020

IEEE Electron Device Lett.

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Because of the difficulty in fabricating iron-core solenoid coils by micro electro-mechanical system (MEMS) processes, existing micromotors typically have an axial-flux structure with planar spiral coils or air-core solenoid coils. However, solenoid iron-core microcoils have a higher inductance and a lower magnetic resistivity than spiral coils and air-core solenoid coils. In this study, a radialflux permanent magnet (PM) micromotor with 3D iron-core MEMS in-chip coils of high aspect ratio was designed and fabricated. The three-phase PM brushless direct current (BLDC) micromotor has four Nd-Fe-B magnet poles on a steel rotor and six solenoid Cu coils of high aspect ratio (coil height/line width = 14) in the silicon stator fabricated using MEMS processes. Iron cores were inserted into the coils, and a low-resistivity magnetic circuit was established. At 100 Hz, the inductance of a 15-turn coil was 13.2µH. The coils were embedded tightly in the silicon substrate, resulting in a good heat dissipation performance and thus a high current-carrying capacity. The hexagonal sheet-type micromotor weighed 2.25 g with a volume of 586.5 mm 3 before bearing packaging. The modeling results showed that at 10000 rpm, the torque was 676µN•m and the power density was 314 W/kg. This micromotor incorporates a conventional large-scale BLDC motor structure and the proposed design will help improve the power density and efficiency of micromotors, thereby broadening their application prospects. Index Terms-Iron-core microcoils, micromotors, permanent magnet motors, power MEMS.

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Section: Introductionmentioning

confidence: 99%