Design of SAW filters on langasite

Chvets, V. B.; Ivanov, P. G.; Makarov, V. M.; Orlov, V. S.

doi:10.1109/ultsym.1999.849405

Cited by 6 publications

(1 citation statement)

References 9 publications

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“…Langasite (LGS) is a promising high-temperature piezoelectric crystal, which is currently widely used in acoustic wave filters, bulk acoustic wave (BAW) sensors, and surface acoustic wave (SAW) sensors in harsh environments [ 1 , 2 , 3 , 4 ]. Compared to other piezoelectric crystals, such as quartz, lithium tantalate, and lithium niobate, langasite exhibits the excellent property of no phase change before melting at 1470 °C, and a lower SAW propagation velocity [ 5 , 6 , 7 , 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

Langasite Bonding via High Temperature for Fabricating Sealed Microcavity of Pressure Sensors

et al. 2022

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We proposed a novel Langasite (LGS) bonding method only using high temperature to solve the manufacturing difficulty of the sealed microcavity of pressure sensors. The optimal bonding parameters by comparative experiments were defined as 1350 °C for 3 h. Due to simple experimental conditions, low experimental cost, and be suitable for bonding wafers with various sizes, the method is convenient for popularization and mass-production, thus promoting the development of surface acoustic wave (SAW) devices at high temperatures. Simultaneously, an intact microcavity was observed by scanning electron microscopy, and a tight and void-free bonding interface with a transition layer thickness of 2.2 nm was confirmed via transmission electron microscopy. The results of tensile and leakage experiments indicated that the bonded wafer with the sealed microcavity exhibited a high bonding strength of 4.02 MPa and excellent seal performance. Compared to the original wafer, the piezoelectric constant of the LGS bonded wafer had a reduction of only 4.43%. The above characteristics show that the sealed microcavity prepared by this method satisfies the conditions for fabricating the LGS SAW pressure sensors. Additionally, based on the bonding interface characterizations, the mechanism of LGS bonding has been investigated for the first time.

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Section: Introductionmentioning

confidence: 99%

Langasite Bonding via High Temperature for Fabricating Sealed Microcavity of Pressure Sensors

et al. 2022

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Homogeneity of elastic properties of lanthanum gallium silicate crystals

Dorogovin

Stepanov²,

Semenkovich³

et al.

Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052)

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Analysis of contributions of nonlinear material constants to stress-induced velocity shifts of quartz and langasite surface acoustic wave resonators

Zhang

Kosinski

2013

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Stress-induced surface acoustic wave velocity shifts are analyzed for langasite (LGS) SAW resonators. The analytical methodology has been verified by comparing experimental results and analytical results for quartz resonators. LGS SAW resonators with Euler angles which are most sensitive and least sensitive to diametrical forces are determined and their applications in force sensors and resonators with minimum acceleration sensitivity are discussed. Sensitivity of the analytical results to different groups of nonlinear material constants is discussed; it was found that for specific configurations, failure to include the third-order piezoelectric constants, dielectric constants and electrostrictive constants may lead to a significant calculation error. Surface acoustic waves propagating on an LGS square plate subject to bending moment along the propagation direction and normal to the propagation direction are analyzed; it was found that the average momentinduced velocity shift of LGS resonators are comparable to quartz resonators. Analyses of the sensitivity of the results to different groups of nonlinear material constants shows that for some specific wave propagation directions, failure to include the third-order piezoelectric constants, dielectric constants, and electrostrictive constants may lead to large errors.

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Design of SAW filters on langasite

Cited by 6 publications

References 9 publications

Langasite Bonding via High Temperature for Fabricating Sealed Microcavity of Pressure Sensors

Langasite Bonding via High Temperature for Fabricating Sealed Microcavity of Pressure Sensors

Homogeneity of elastic properties of lanthanum gallium silicate crystals

Analysis of contributions of nonlinear material constants to stress-induced velocity shifts of quartz and langasite surface acoustic wave resonators

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