Design of T-shape vector hydrophone based on MEMS

Guan, Linggang; Zhang, Guojun; Xu, J. Q.; Chen, Xue; Zhang, Wendong; Xiong, Jijun

doi:10.1016/j.sna.2012.01.018

Cited by 20 publications

(10 citation statements)

References 8 publications

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“…This is possible because the noise floor is determined by the electronic readout; therefore, the increase in the SNR is directedly proportional to the increase in mechanical sensitivity. For applications that only require narrow band detection the sensor demonstrated herein can be operated with sensitivity around two to three orders of magnitude higher than the sensors reported in [ 17 , 18 , 19 , 20 ]. The sensor in underwater operation showed a cosine dependence on the angle of sound incidence similar to that obtained in air.…”

Section: Discussionmentioning

confidence: 90%

“…Sensing the motion of the medium has been studied for decades by various research groups [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 ]. Leslie et al [ 1 ] described the operation of hydrophones enclosed within a spherical housing.…”

Section: Introductionmentioning

confidence: 99%

“…There have been some studies of MEMS-based underwater sensors. Guan et al [ 18 ] reported on a T-shaped vector sensor that uses a pair of long cantilever beams with piezoresistors on its transverse sections. Deformation of the beams caused by an underwater acoustic signal induces a resistance variation that is related to the direction and pressure of the wave.…”

Section: Introductionmentioning

confidence: 99%

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MEMS Underwater Directional Acoustic Sensor in Near Neutral Buoyancy Configuration

Alves

Park

McCarty

et al. 2022

Sensors

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A MEMS directional acoustic sensor housed in an air cavity and operated underwater in a near-neutral buoyancy configuration is demonstrated. The sensor consists of two wings connected by a bridge and attached to a substrate by two centrally mounted torsional legs. The frequency response showed two resonant peaks corresponding to a rocking mode (wings moving in opposite directions) and a bending mode (wings moving in the same direction). Initial tests of the sensor using a shaker table showed that the response is highly dependent on the vibration direction. In air, the sensor showed a maximum sensitivity of about 95 mV/Pa with a cosine directional response. Underwater, the maximum sensitivity was about 37 mV/Pa with a similar cosine directional response. The measured maximum SNR was about 38 dB for a signal generated by a sound stimulus of 1 Pa when the sensor is operated near the bending resonance. The results indicate that this type of MEMS sensor can be operated in a near-neutral buoyant configuration and achieve a good directional response.

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Section: Discussionmentioning

confidence: 90%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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MEMS Underwater Directional Acoustic Sensor in Near Neutral Buoyancy Configuration

Alves

Park

McCarty

et al. 2022

Sensors

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“…13 That is, comparing the output of the tested MEMS vector hydrophone with the output of CS-3A standard hydrophone. 14,15 The expression of sensitivity is:…”

Section: B Calibration Test In the Standing Wave Tubementioning

confidence: 99%

Resonant frequency of the silicon micro-structure of MEMS vector hydrophone in fluid-structure interaction

2015

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The MEMS vector hydrophone developed by the North University of China has advantages of high Signal to Noise Ratio, ease of array integration, etc. However, the resonance frequency of the MEMS device in the liquid is different from that in the air due to the fluid-structure interaction (FSI). Based on the theory of Fluid-Solid Coupling, a generalized distributed mass attached on the micro-structure has been found, which results in the resonance frequency of the microstructure in the liquid being lower than that in the air. Then, an FSI simulation was conducted by ANSYS software. Finally, the hydrophone was measured by using a shaking table and a vector hydrophone calibration system respectively. Results show that, due to the FSI, the resonance frequency of the MEMS devices of the bionic vector hydrophone in the liquid declines approximately 30% compared to the case in the air.

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“…이러한 연구는 네덜란드의 Bree et al [4] 에 의해 2 개의 선으로 유체의 음향 유속을 측정하는 Microflown sensor와 중국의 Guan et al [7] 에 의해 제작된 실린더 형태의 음압 감응부와 이를 지지하는 빔에 압저항을 붙여 휘트스톤 브릿지의 원리를 이용하여 방향성을 측정하는 벡터 센서의 예에서 찾을 수 있다. [5][6][7] 본 …”

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Modeling of Sound-structure Interactions for Designing a Piezoelectric Micro-Cantilever Acoustic Vector Sensor

Yang¹

2015

The Journal of the Acoustical Society of Korea

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An acoustic vector sensor is a device that is capable of measuring the direction of wave propagation and the acoustic pressure. In this paper, the modeling of micro-cantilever sensor for the vector sensor are proposed by consideration of acoustic phenomenon in water. Two models based on unimorph structure are proposed in this paper and corresponding transfer function which describes the relation between input pressure wave and output voltage depending on incidence angle and frequency of pressure wave is derived based on lumped model. It has been shown that very thin and flexible micro-cantilever can be used to measure directly the particle velocity component in water.

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Design of T-shape vector hydrophone based on MEMS

Cited by 20 publications

References 8 publications

MEMS Underwater Directional Acoustic Sensor in Near Neutral Buoyancy Configuration

MEMS Underwater Directional Acoustic Sensor in Near Neutral Buoyancy Configuration

Resonant frequency of the silicon micro-structure of MEMS vector hydrophone in fluid-structure interaction

Modeling of Sound-structure Interactions for Designing a Piezoelectric Micro-Cantilever Acoustic Vector Sensor

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