2019
DOI: 10.1117/1.jmm.18.4.043507
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Design, simulation, and fabrication of three-dimensional microsystem components using grayscale photolithography

Abstract: Grayscale lithography is a widely known but underutilized microfabrication technique for creating three-dimensional (3-D) microstructures in photoresist. One of the hurdles for its widespread use is that developing the grayscale photolithography masks can be time-consuming and costly since it often requires an iterative process, especially for complex geometries. We discuss the use of PROLITH, a lithography simulation tool, to predict 3-D photoresist profiles from grayscale mask designs. Several examples of op… Show more

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Cited by 30 publications
(19 citation statements)
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“…41 Photolithography using grayscale masks also enables to fabricate 3D microfluidics in one step. 42 However, these masks are generally very costly to fabricate. Lai et al employed backside diffused light lithography using pseudo-grayscale masks as a cost-effective and simple approach to fabricate 3D microfluidic in a single UV step.…”
Section: Fabricationmentioning
confidence: 99%
“…41 Photolithography using grayscale masks also enables to fabricate 3D microfluidics in one step. 42 However, these masks are generally very costly to fabricate. Lai et al employed backside diffused light lithography using pseudo-grayscale masks as a cost-effective and simple approach to fabricate 3D microfluidic in a single UV step.…”
Section: Fabricationmentioning
confidence: 99%
“…To test the impact of prestress in 3D tissues on electrophysiology maturation, we sought to create micro heart muscle arrays (µHM) of various geometries, as simple continuum mechanics models of tissue compaction predict a direct link between tissue geometry and prestress [8]. Soft lithography is a common technique for creating molds to control the geometry of micro-scale engineered tissues, but is time consuming, requires specialized facilities, and limits the complexity of devices produced [12], [13]. Due to these inherent limitations, we turned to high resolution 3D-printing for mold creation.…”
Section: Mainmentioning
confidence: 99%
“…Photolithography is a common technique for creating molds to control the geometry of these microscale engineered tissues, but it is time consuming, requires specialized facilities, and limits the complexity of devices produced. , Due to these inherent limitations, stereolithographic (SLA) 3D printing has been suggested as a replacement for soft lithography to enable rapid fabrication of microdevices. With the invention of new, higher-resolution printers capable of resolutions under 25 μm in all x – y – z directions, this would enable tissue creation at sizes that are both biologically relevant and practical .…”
Section: Introductionmentioning
confidence: 99%