Determination of gases by a combined study of the resistance and noise characteristics of semiconductor sensors

Shaposhnik, A. V.; Ugryumov, R. B.; Voishchev, V. S.; Ryabtsev, S. V.

doi:10.1007/s10809-005-0101-2

Search citation statements

Order By: Relevance

Paper Sections

Select...

Chemical Sensors1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2009

2016

Publication Types

Select...

Article2

Relationship

Self Cite0

Independent2

Authors

Journals

Cited by 2 publications

(1 citation statement)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Another study used the noise characteristics to improve the selectivity of semiconductor sensors (Shaposhnik et al 2005). The total noise PSD of the sensors were composed of both chemisorption of gases and vapors, and chemical reactions between reducing gases and air oxygen that occur on the sensor surface.…”

Section: Chemical Sensorsmentioning

confidence: 99%

Noise in MEMS

Mohd-Yasin

Nagel

Korman

2009

Meas. Sci. Technol.

129

View full text Add to dashboard Cite

This review provides a comprehensive recap of noise research in MEMS. Some background on noise and on MEMS is provided. We review noise production mechanisms, and highlight work on the theory and modeling of noise in MEMS. Then noise measurements in the specific types of MEMS are reviewed. Inertial MEMS (accelerometers and angular rate sensors), pressure and acoustic sensors, optical MEMS, RF MEMS, surface acoustic wave devices, flow sensors, and chemical and biological MEMS, as well as data storage devices and magnetic MEMS, are reviewed. We indicate opportunities for additional experimental and computational research on noise in MEMS.

show abstract

Section: Chemical Sensorsmentioning

confidence: 99%