Determination of the ratio in a-C:H films by infrared spectrometry analysis

Martino, C. De; Demichelis, Francesca; Tagliaferro, Alberto

doi:10.1016/0925-9635(95)00295-2

Cited by 35 publications

(7 citation statements)

References 11 publications

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“…The absorption spectra were deconvolved in order to determine the different C-H bond vibrational frequencies and corresponding intensities. These are given in Table 2 [9]. A representative fit is shown in Fig.…”

Section: Resultsmentioning

confidence: 97%

Optical properties of hydrogenated amorphous carbon thin films prepared by dc saddle field plasma-enhanced chemical vapor deposition

Pisana

O’Leary

Żukotyński

2005

Journal of Non-Crystalline Solids

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Section: Resultsmentioning

confidence: 97%

Optical properties of hydrogenated amorphous carbon thin films prepared by dc saddle field plasma-enhanced chemical vapor deposition

Pisana

O’Leary

Żukotyński

2005

Journal of Non-Crystalline Solids

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“…The total sp 3 fraction thus might be underestimated and the sp 2 /sp 3 ratio overestimated. 31,32 Before discussing the two quantities mentioned above the individual fitted absorption peaks are discussed qualitatively.…”

Section: Resultsmentioning

confidence: 99%

Optical and mechanical properties of plasma-beam-deposited amorphous hydrogenated carbon

Gielen

Kleuskens

Sanden

et al. 1996

Journal of Applied Physics

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Amorphous hydrogenated carbon films have been deposited on crystalline silicon and on glass from an expanding thermal plasma. Two deposition parameters have been varied: the electric current through the plasma source and the admixed acetylene flow. No energetic ion bombardment has been applied during deposition. Ex situ analysis of the films yields the infrared refractive index, hardness, Young's modulus, optical band gap, bonded hydrogen content, and the total hydrogen and mass density. The infrared refractive index describes the film properties independent of which plasma deposition parameter ͑arc current or acetylene flow͒ has been varied. The hardness, Young's modulus, sp 2 /sp 3 ratio, and mass density increase with increasing refractive index. The optical band gap and hydrogen content of the films decrease with increasing refractive index. It is demonstrated that plasma-beam-deposited diamondlike a-C:H has similar properties as material deposited with conventional plasma-enhanced chemical-vapor-depositions techniques under energetic ion bombardment.

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“…For a given method, the ratio of sp 3 to sp 2 -coordinated carbon can be affected by the presence of hydrogen in the films [1]. The beneficial properties of DLC stem from the continuous rigid random networks of sp 3 carbon atoms, and the properties can essentially be tailored by controlling the sp 3 /sp 2 ratio [4][5][6][7]. The deposition mechanisms of DLC can be described in both macroscopic and microscopic terms.…”

Section: Introductionmentioning

confidence: 99%