Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser

Artioukov, Igor A.; Benware, B.; Rocca, J. J.; Forsythe, Matt; Uspenskii, Yu. A.; Виноградов, А. В.

doi:10.1109/2944.814989

Cited by 36 publications

(12 citation statements)

References 26 publications

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“…The 25-80 nm wavelength region is of particular relevance to many rapidly growing technological and scientific fields, such as solar physics [1,2] synchrotron and free electron laser facilities [3] and other EUV sources such as table-top capillary discharge lasers [4]. Some applications of EUV sources emitting in the 25-80 nm wavelength range include plasma physics [5], the characterization of materials and optical elements [6,7] materials damage [3], photochemistry of biological molecules [8], nanopatterning [9], and ultrafast single-shot microscopy [10].…”

Section: Introductionmentioning

confidence: 99%

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Fernández-Perea¹,

Soufli²,

Robinson³

et al. 2012

Opt. Express

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Abstract:We have developed new, Mg/SiC multilayer coatings with corrosion barriers which can be used to efficiently and simultaneously reflect extreme ultraviolet (EUV) radiation in single or multiple narrow bands centered at wavelengths in the spectral region from 25 to 80 nm. Corrosion mitigation was attempted through the use of Al-Mg or Al thin layers. Three different multilayer design concepts were developed and deposited by magnetron sputtering and the reflectance was measured at near-normal incidence in a broad spectral range. Standard Mg/SiC multilayers were also deposited and measured for comparison. They were shown to efficiently reflect radiation at a wavelength of 76.9 nm with a peak reflectance of 40.6% at near-normal incidence, the highest experimental reflectance reported at this wavelength for a narrowband coating. The demonstration of multilayer coatings with corrosion resistance and multiple-wavelength EUV performance is of great interest in the development of mirrors for space-borne solar physics telescopes and other applications requiring long-lasting coatings with narrowband response in multiple emission lines across the EUV range.

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Section: Introductionmentioning

confidence: 99%

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Fernández-Perea¹,

Soufli²,

Robinson³

et al. 2012

Opt. Express

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“…The measurements of the optical constants of InP and GaAsP constitute, to the best of our knowledge, the first experimental values at this wavelength, while for the rest of the materials, the values obtained are in most cases in good agreement with tabulated values. These measurements and the analysis of the data are discussed in more detail in a recent paper [17].…”

Section: Recent Progress In X-ray Lasersmentioning

confidence: 99%

Capillary discharge tabletop soft X-ray lasers reach new wavelengths and applications

Rocca

Frati

Benware

et al. 2000

Comptes Rendus de l'Académie des Sciences - Series IV - Physics

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Abstract.For many years, researchers have envisioned the development of compact high repetition rate tabletop soft X-ray lasers that could be routinely used in application in numerous disciplines. With demonstrated average powers of several mW and mJ-level pulse energy at 46.9 nm, capillary discharge-pumped lasers are the first compact lasers to reach this goal. In this paper we summarize the development status of high repetition rate tabletop soft X-ray lasers based on capillary discharge excitation, and give examples of their successful use in several applications. Results of the use of a capillary discharge pumped 46.9 nm laser in dense plasma interferometry, soft X-ray reflectometry for the determination of optical constants, and laser ablation are described. The observation of lasing at 53 nm line in Ne-like Cl with output pulse energy up to 10 µJ is also reported. © 2000 Académie des sciences/Éditions scientifiques et médicales Elsevier SAS tabletop soft X-ray lasers Vers de nouvelles longueurs d'onde et applications pour les lasers X-UV compacts à décharge capillaire Résumé. Depuis de nombreuse années, les chercheurs prévoient le développement de laser X-UV compacts, dits « de table », qui pourraient être utilisés en routine pour les applications à des disciplines variées. Avec des puissances moyennes mesurées de plusieurs

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“…The application of this laser to plasma shadowgraphy [8] and soft X-ray reflectometry for the determination of optical constants [9] has been discussed in recent publications.…”

Section: Applicationsmentioning

confidence: 99%

Extremely compact soft X-ray lasers based on capillary discharges

Rocca

Filevich

Hammarsten

et al. 2003

Free Electron Lasers 2002

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Extremely compact high repetition rate soft X-ray lasers based on capillary discharge excitation have demonstrated average powers of a few milliWatt at 46.9 nm, milli-Joule-level pulse energy, peak spectral brightness several orders of magnitude larger than third-generation synchrotron beam lines, and excellent spatial coherence. Examples of the use of a capillary discharge soft X-ray laser in dense plasma diagnostics and laser ablation of materials are summarized. r

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Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser

Cited by 36 publications

References 26 publications

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region

Capillary discharge tabletop soft X-ray lasers reach new wavelengths and applications

Extremely compact soft X-ray lasers based on capillary discharges

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