Development and control of a two DOF linear–angular precision positioning stage

Clark, Leon; Shirinzadeh, Bijan; Bhagat, Umesh; Smith, Julian Anderson; Zhong, Yongmin

doi:10.1016/j.mechatronics.2015.10.001

Cited by 59 publications

(22 citation statements)

References 29 publications

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“…Table 4 shows the comparison between the proposed actuator and several existing rotary precision actuators of their presented excellent performances [ 18 , 19 , 20 ]. Although the velocity (steady state: no slip) and output torque that the proposed actuator can achieve are relatively lower, it exhibits several advantages as well.…”

Section: Experiments and Discussionmentioning

confidence: 99%

“…Piezoelectric actuators can work at a resonant state [ 10 , 11 , 12 , 13 , 14 ] or non-resonant state [ 15 , 16 , 17 , 18 , 19 , 20 , 21 ]. From the viewpoint of the connecting form of the piezoelectric element and the stator, the piezoelectric actuators can also be divided into the bonded-type and clamped-type.…”

Section: Introductionmentioning

confidence: 99%

“…Thus, mechanical magnification mechanisms, like the combination of levers and flexure hinges, are utilized to magnify the output displacement. Clark et al designed a flexure-based precision positioning stage, their prototype achieved a rotary resolution of 0.075 μrad and a rotary stroke of 535.8 μrad [ 18 ]; Juuti et al designed a bridge-type amplifier structure to amplify the displacement of the input translation [ 28 ]; Li et al compounded the parallelogram flexures and bridge-type displacement amplifiers in an XY stage [ 29 ]; meanwhile, the use of the magnification mechanism decreases the output stiffness of the actuator, making the output force relatively small. Inertia-driving actuators, based on the inertia theorem, utilize the interaction between the stator and mover to produce the precision motion.…”

Section: Introductionmentioning

confidence: 99%

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A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

Liu

Wang

et al. 2018

Sensors

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A four-feet walking-type rotary piezoelectric actuator with minute step motion was proposed. The proposed actuator used the rectangular motions of four driving feet to push the rotor step-by-step; this operating principle was different with the previous non-resonant actuators using direct-driving, inertial-driving, and inchworm-type mechanisms. The mechanism of the proposed actuator was discussed in detail. Transient analyses were accomplished by ANSYS software to simulate the motion trajectory of the driving foot and to find the response characteristics. A prototype was manufactured to verify the mechanism and to test the mechanical characteristics. A minimum resolution of 0.095 μrad and a maximum torque of 49 N·mm were achieved by the prototype, and the output speed was varied by changing the driving voltage and working frequency. This work provides a new mechanism for the design of a rotary piezoelectric actuator with minute step motion.

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Section: Experiments and Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

Liu

Wang

et al. 2018

Sensors

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“…Piezoelectric actuators are being used as a part of a hybrid xy stage used in a novel large measurementrange atomic force microscopy (AFM) system [5]. In [6], the authors presented mechanical design, optimisation and tracking control of a flexure-based positioning stage capable to generate coupled angular and linear motions. The mechanism employs two piezoelectric actuators, with output rotation and translation proportional to the sum and difference of the input displacements.…”

Section: Introductionmentioning

confidence: 99%

“…The used filter was a low-pass filter with cut-off frequency of 100 Hz. According to (6), the force error is transformed to the position error e p . The position control algorithm tends to bring the position error close to zero, which will consequently bring the measured force close to the reference force.…”

mentioning

confidence: 99%

Force control of piezoelectric walker

Uzunović

Golubovic²,

Şabanoviç

2016

IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society

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Abstract-This paper is concerned with the force control of a walking piezoelectric motor, a commercially available Piezo LEGS motor. The motor is capable of providing high precision positioning control on nanometer scale, but also relatively high forces up to 6 N. The proposed force control algorithm is very simple, but effective, and it is based on a recently presented coordinate transformation. The transformation allows definition of the driving waveforms for the motor according to a desired motion of the motor legs in the plane of motion. Such a possibility opens a path for creating the y-direction interaction force between the motor legs and the rod which is enough to ensure no relative motion between the legs and the rod. Once that is achieved, one can control the x-direction force imposed by the motor rod on its environment. The presented force control scheme has been successfully validated through a series of experiments.

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Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

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Piezoelectric actuation technology has been widely used in various precise‐oriented fields. Its notable advantages include high resolution, rapid response speed, output force with high density, and immunity to electromagnetic interference. Characteristics of cross‐scale and multiple‐degree‐of‐freedom (multi‐DOF) output motions are of utmost importance in the context of micro‐/nanopositioning technology. For decades, researchers have been working to develop various piezoelectric devices that exploit these important properties. In this review, a comprehensive review of recent research efforts in the field of cross‐scale multi‐DOF piezoelectric drive technology is provided. To commence, it provides an in‐depth exploration of the unique advantages associated with piezoelectric actuation, demonstrating them through comparative analyses with alternative actuation methods. Subsequently, the complexity of piezoelectric cross‐scale motion is introduced, and the multi‐DOF piezoelectric motion is classified in detail. Furthermore, the practical applications of multi‐DOF cross‐scale piezoelectric actuation technology are systematically elucidated, highlighting its versatility and suitability in real‐world environments. Finally, an in‐depth discussion that addresses the challenges encountered in the field is provided, and the prospective directions for further developments in piezoelectric actuation technology are outlined. This scholarly contribution plays an important role in guiding future research and innovative initiatives.

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Development and control of a two DOF linear–angular precision positioning stage

Cited by 59 publications

References 29 publications

A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

A Four-Feet Walking-Type Rotary Piezoelectric Actuator with Minute Step Motion

Force control of piezoelectric walker

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

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