2009
DOI: 10.1063/1.3204458
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Development and performance test of a soft x-ray polarimeter and ellipsometer for complete polarization analysis

Abstract: A new apparatus for polarimetric and ellipsometric measurements based on the rotating-analyzer method in the soft x-ray region has been designed, constructed, and installed in the soft x-ray beamline (BL-11) at the SR Center of Ritsumeikan University, Shiga, Japan. It can realize the optical configurations for the complete polarization analysis by using six independently movable drive shafts. A demonstration of the capabilities of the apparatus has been performed using Mo/Si multilayer polarizers deposited by … Show more

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Cited by 16 publications
(5 citation statements)
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“…method, I(), follows the modified Malus's law expressed as follows (Kimura et al, 1993;Hecht, 2002;Imazono et al, 2009),…”
Section: Figurementioning
confidence: 99%
“…method, I(), follows the modified Malus's law expressed as follows (Kimura et al, 1993;Hecht, 2002;Imazono et al, 2009),…”
Section: Figurementioning
confidence: 99%
“…Therefore, a complete polarization analysis is usually performed at synchrotrons with sophisticated polarimetric and ellipsometric instruments. [9][10][11] In a small-scale laboratory, various EUV and soft X-ray light sources are available, but only few of them are a priori polarized. While linearly polarized EUV light is routinely generated by intense ultrashort laser pulses, 12 only few attempts to either polarize EUV radiation circularly 13,14 or directly generate circular EUV radiation from a femtosecond laser 15 have been reported from laboratory-based experiments.…”
Section: Introductionmentioning
confidence: 99%
“…Measurements by the manufacturer at several wavelengths are in good agreement with the calculations, figure 3(b). The diffraction efficiencies at the incidence angles and diffraction orders used in these experiments have been measured using synchrotron radiation [63,64]; comparison of the harmonic spectra obtained from the second and third diffraction orders (see later, in figure 6(c)), suggests that the diffraction efficiencies are valid with a relative accuracy of better than several percent. Quantum efficiency data and gain are provided by the CCD manufacturers.…”
Section: Methodsmentioning
confidence: 99%