Development of a cross-scale 6-DOF piezoelectric stage and its application in assisted puncture

Chang, Qingbing; Gao, Xiang; Liu, Yingxiang; Deng, Jie; Zhang, Shijing; Chen, Weishan

doi:10.1016/j.ymssp.2022.109072

Cited by 20 publications

(7 citation statements)

References 34 publications

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“…Based on the inertial actuation principle and series-parallel structure, PI developed some novel 6-DOF positioning platforms, such as, the Q-821.140 with the size of 79.5 Â 72.9 Â 48 mm 3 achieving the motion strokes of 12 mm Â 12 mm Â 6 mm Â 12°Â 12°Â 33°and the resolutions of 10 nm Â 10 nm Â 20 nm Â 0.9 μrad Â 0.9 μrad Â 0.9 μrad, the Q-845.140 with the size of 173.9 Â 163.7 Â 77 mm 3 achieving the motion strokes of 14 mm Â 14 mm Â 10 mm Â 14°Â 14°Â 16°and the resolutions of 6 nm Â 6 nm Â 20 nm Â 0.9 μrad Â 0.9 μrad Â 0.9 μrad. Harbin Core Tomorrow Science & Technology Co., Ltd., has developed a series of multi-DOF positioning devices, which have achieved sub-nanometer resolution and nanoscale positioning accuracy and have been wildly used in the fields of beam scanning and precision positioning, such as, the 6-DOF positioning stage of N90.XYZTR5 with the motion [201] Copyright 2022, Elsevier. b) The stage by Cai et al Reproduced with permission.…”

Section: Series-parallel Hybrid-type Multi-dof Piezoelectric Actuationmentioning

confidence: 99%

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Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

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Piezoelectric actuation technology has been widely used in various precise‐oriented fields. Its notable advantages include high resolution, rapid response speed, output force with high density, and immunity to electromagnetic interference. Characteristics of cross‐scale and multiple‐degree‐of‐freedom (multi‐DOF) output motions are of utmost importance in the context of micro‐/nanopositioning technology. For decades, researchers have been working to develop various piezoelectric devices that exploit these important properties. In this review, a comprehensive review of recent research efforts in the field of cross‐scale multi‐DOF piezoelectric drive technology is provided. To commence, it provides an in‐depth exploration of the unique advantages associated with piezoelectric actuation, demonstrating them through comparative analyses with alternative actuation methods. Subsequently, the complexity of piezoelectric cross‐scale motion is introduced, and the multi‐DOF piezoelectric motion is classified in detail. Furthermore, the practical applications of multi‐DOF cross‐scale piezoelectric actuation technology are systematically elucidated, highlighting its versatility and suitability in real‐world environments. Finally, an in‐depth discussion that addresses the challenges encountered in the field is provided, and the prospective directions for further developments in piezoelectric actuation technology are outlined. This scholarly contribution plays an important role in guiding future research and innovative initiatives.

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Section: Series-parallel Hybrid-type Multi-dof Piezoelectric Actuationmentioning

confidence: 99%

mentioning

confidence: 99%

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

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“…Specifically, piezoelectric stages offer resolutions in the micrometer-to nanometer-order range and are employed for ultrahigh-precision positioning. [32][33][34] However, their driving range is constrained to the submillimeter order, and even stages with expanded driving capabilities through piezoelectric motors are limited to ≈10 cm. [35] In contrast, mobile robots utilizing piezoelectric elements have demonstrated an increased driving range.…”

Section: Introductionmentioning

confidence: 99%

Automatic Holonomic Mobile Micromanipulator for Submillimeter Objects Inspired by the Rhinoceros Beetle

Suzuki,

Iida,

Tsukui

et al. 2024

Advanced Intelligent Systems

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Holonomic mobile micromanipulators driven by piezoelectric actuators offer precision and compact design. However, attaining both high speed and positioning repeatability with sufficient load capacity poses challenges, given that lightweight robots are susceptible to nonuniform driving surfaces and external forces. A holonomic beetle (HB) is proposed to realize a wide range, compact size, precise holonomic motion, automatic micromanipulation, and high‐speed movement simultaneously. Inspired by the biological makeup of a Rhinoceros Beetle, a length, weight, and load capacity of 8 cm, 74 g, and of 2000 g, respectively, are used. The HB is a two‐legged robot with a pseudoalternating tripod gait locomotion principle, with five piezoelectric actuators for XYθ displacement and switching of the contact leg. It achieves maximum walking velocities of 11.6 mm s−1 for translational motion and 19.3 deg s−1 for rotation, with a displacement resolution of 12 nm. Notably, under open‐loop control, the HB demonstrates high repeatability with a coefficient of variation of 0.3%. It exhibits the capability to climb 30°‐inclined surfaces, traverse flat surfaces with 0.1 mm bumps, and navigate 30 mm pits. Furthermore, the HB showcases practical automatic micromanipulation through visual servo control and machine learning, presenting potential applications in biomedical and microassembly fields.

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“…Regarding the aspect of configuration design, multi-DOF large stroke micropositioning stages are commonly divided into spatial 3-DOF xyz [22], xyθ z [23][24][25][26], 3-DOF θ x θ y z [27], and spatial 6-DOF [28,29]. Over the past few years, numerous studies have reported on planar large stroke 3-DOF xyθ z micropositioning stages, which meet large stroke and high precision performance requirements through effective structural design and control methods.…”

Section: Introductionmentioning

confidence: 99%

Voice coil motor-driven multi-DOF compliant parallel micropositioning stage based on a large range beam-based spherical hinge and fully symmetrical layout

Chen

Lai

Fang

et al. 2023

J. Micromech. Microeng.

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With the recent rapid developments in the field of precision engineering, demand for the large range multi-degrees-of-freedom (DOF) micropositioning stage has increased significantly. In this paper, to solve the problems of small motion range, local stress concentration, and low motion accuracy caused by the parasitic motion of the traditional flexure hinge in the multi-DOF micropositioning stage, we first propose a type of large-range beam-based flexure spherical hinge (BFSH). Subsequently, based on the proposed BFSH, a large range 3-DOF θxθyz spatial micropositioning stage driven by the voice coil motor (VCM) is designed employing parallel branch chains and a fully symmetrical layout. This arrangement realizes theoretical motion decoupling in structural design. Furthermore, we use the geometric method to derive kinematic equations of the moving platform, which are used as the decoupling matrix of the control loop. Based on the compliance matrix method and Lagrange’s method, the compliance matrix model of the BFSH, the 3-DOF micropositioning stage, and the stage dynamic model are determined respectively. Additionally, finite element analysis (FEA) and experimental tests are conducted to verify the accuracy of the analytical model and assess the static and dynamic performance of the designed 3-DOF stage. Moreover, a fractional order phase advanced proportional integral (FOPAPI) controller is designed for closed-loop control to track the sinusoidal trajectory and spherical trajectory. The results reveal that the stage can achieve the desired large workspace of ± 21.5 mrad × ± 20.3 mrad × ± 3.23 mm, as well as excellent decoupling and trajectory tracking performance.

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Development of a cross-scale 6-DOF piezoelectric stage and its application in assisted puncture

Cited by 20 publications

References 34 publications

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Automatic Holonomic Mobile Micromanipulator for Submillimeter Objects Inspired by the Rhinoceros Beetle

Voice coil motor-driven multi-DOF compliant parallel micropositioning stage based on a large range beam-based spherical hinge and fully symmetrical layout

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