Development of a High-Resolution Touch Trigger Probe Based on an Optical Lever for Measuring Micro Components

Feng, Xiaoyu; Xu, Peng; Li, Ruijun; Lei, Ying-Jun; Zhang, Liansheng; Wang, Biao; Huang, Qiangxian

doi:10.1109/jsen.2022.3155636

Cited by 6 publications

(1 citation statement)

References 35 publications

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“…The top of the micro-nano CMM probe [6][7][8] is a microsphere with a diameter of tens to hundreds of micrometres, and this microsphere is mostly self-made to meet the needs of micro-size measurement. 9,10 Therefore, the contour error of the microsphere affects the measurement accuracy of micro-nano CMMs. A micropore measurement system for automotive fuel injector is constructed by a quartz tuning fork resonance probe in this study, and the micropore is precisely measured by combining the morphology information of the self-made microsphere at the top of the probe.…”

Section: Introductionmentioning

confidence: 99%

Measurement of micropore by resonant probe with microsphere

Fang,

Mei,

Zhang

et al. 2023

AIP Advances

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A micro–nano coordinate measuring machine (CMM) is an instrument for high-precision measurement of micro-precision parts. The top of its probe is a microsphere with a diameter of tens to hundreds of micrometres. When the probe microsphere touches the part for measurement, its accuracy is affected by the surface morphology of the microsphere. A tuning fork resonant probe used for micro–nano CMMs is used to measure the contour of the micropore in automotive fuel injection nozzles in this study. Combined with the self-made optical fiber microsphere cross-sectional circle parameters at the top of the tuning fork probe, precise measurement of micropore diameter and roundness is achieved. During the experiment, the microsphere and micropore were measured by two independent systems, and thus, the error caused by the initial measurement angle of the microsphere and micropore is evaluated. The experimental results indicate that the measured micropore diameter is 194.542 µm and the roundness is 2.551 µm. The error caused by the initial measurement angle evaluated by the cubic Hermitian interpolation method can be ignored relative to the measurement results. The micropore structure parameters are precisely measured by the resonant probe combined with the morphology information of its top microsphere in this study, providing a research method for improving the measurement accuracy of micro–nano CMMs by combining microsphere morphology features.

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