Development of a new signal processor for tetralateral position sensitive detector based on single-chip microcomputer

Huang, Meizhen; Long-zhao, Shi; Wang, Yuxing; Ni, Yi; Li, Zhenqing; Ding, Hongwei

doi:10.1063/1.2336767

Cited by 6 publications

(3 citation statements)

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“…Although the linearity performance has been improved by this approach, the sophisticated fabrication procedure has increased the cost. On the other hand, advanced signal processing methods like neutral network algorithms have been developed to calculate the spot position instead of the conventional formula (Huang et al 2006). But these methods require deliberate calibration procedures and computations which make them difficult to be implemented in real applications.…”

Section: Introductionmentioning

confidence: 99%

The effect of spot size on linearity improvement of tetra-lateral position sensitive detector

Soh

2011

Opt Quant Electron

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Linearity improvement of tetra-lateral position sensitive detector (PSD) is highly desired in many applications where accurate measurements of the PSD are required. The effect of beam size on our newly proposed linearity improvement scheme is discussed in this paper. Theoretical studies on the electrical potential and collected photocurrents are presented to simplify the numerical calculation when the beam size of the spot is considered. Simulation results show that our new formula can still give a nearly perfect linearity and measurement accuracy even if the spot has a considerable beam size.

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Section: Introductionmentioning

confidence: 99%

The effect of spot size on linearity improvement of tetra-lateral position sensitive detector

Soh

2011

Opt Quant Electron

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“…Ivan et al [24,25] and Li [26] applied a PSD to a position measurement system and introduced the position computing method. Huang et al [27] proposed the position compensation method for the PSD measurement. This study described that the farther the PSD was from the center during position measurement, the larger the error was between the measurement result and the actual and measured positions.…”

Section: Introductionmentioning

confidence: 99%

A Study of 2D Contour Measurement System at Tool Center Point of Machine Tools

Chen

Tsai

2022

Machines

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This study proposes a 2D contour measurement system at the tool center point (TCP) that consists of a Blu-ray pickup head and position sensitive detector (PSD). The TCP displacement is equivalent to the relative position between the tool and workpiece. When the machine tools operate the machine part along the desired contour, the TCP displacement affects the machining geometric accuracy. To evaluate the TCP displacement, the contour errors are measured by the cross-grid encoder (KGM) in practice. However, it is difficult to install KGM as it is large and expensive. In this study, an optical measurement system (OMS) is constructed to measure the TCP displacement, named TCP-OMS. A Blu-ray pickup head was installed on the spindle as a tool, and a PSD was installed on the table as a workpiece. To enhance the measurement signal’s resolution and precision of TCP-OMS, the noise was reduced by an AC voltage stabilizer, a DC regulator, and a low-pass filter. The experimental results show that the resolution of displacement measurement was less than 1 , and the linearity regions of the X-orientation and Y-orientation were ±3 . The motion test on the circular paths were performed on an actual machine tool, and the repeatability tests of this measurement system were verified. The measurement data of circular paths were collected by TCP-OMS and KGM and the results were then compared. When the feed rate of the circular paths increased, the circular deviations were magnified, simultaneously. The axis reversal spikes were observed at the quadrants of a circular path. These measurement results of TCP-OMS matched with the measurement results of KGM. The TCP-OMS developed in this study is characterized by simple installation, compactness, and a low price. It is suitable for 2D contour measurement at the tool center point of machine tools.

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“…This approach will remove the concern of additional cost in manufacturing and other problems associated with a complicated PSD structure. In the literature, estimation methods based on neutral network and interpolation algorithms have been developed [49,50]. However, in order to get an accurate estimate, they need a huge number of training data from the calibration process before the deployment of the PSD which is time consuming.…”

Section: Principle Of Afm Sensingmentioning

confidence: 99%

High performance nano-scale measurements by advanced atomic force estimation

Ci¹

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Atomic force microscopy (AFM) was invented by G. Binnig and his collaborators in 1986 after the invention of scanning tunnelling microscopy (STM) in the early 1980s. The AFM system deploys a tiny probe to interact with the sample such that topography information of the sample can be obtained. The resolutions of the AFM topography images are in the nanometer scale and they are limited only by the probe diameters. Besides, in AFM imaging, there is no requirement on sample preparation and conductivity. Thus, the AFM provides an easy platform to observe, measure and manipulate atomic interactions. Since its invention, AFM has become an indispensable tool in the research areas of material sciences and biological sciences. The AFM is also widely used in many industry applications in microelectronics and data storage. Although many research areas and industry applications have benefited from the success of AFM, there is still an urgent need to improve the measurement resolution and accuracy of the AFM in order to further exploit the atomic characteristics at the scales of atoms or even smaller. In addition, AFM has been modified as a Casimir oscillator to study quantum fluctuations where highly accurate and precise measurement is also desired. Driven by this motivation, this thesis will focus on the improvement of accuracy ix and resolution of the AFM and its modified system, the Casimir oscillator. Our approach to accuracy and resolution enhancement of the AFM system is by tackling the measurement errors that arise from its components such as the position sensitive detector (PSD) and the sensing principle in the AFM sensing system. In our work, we have proposed a new concept of linearity indices to quantitatively measure the measurement inaccuracies of various PSDs. Based on these linearity indices, new design formulae are proposed for 2-D tetra-lateral PSD and quadrant detector. Their measurement accuracy are significantly improved via our new formulae as well as robustness to the incident beam size and parameter variation. Besides the AFM sensing system, inaccuracies also come from the probe-sample separation estimation. To address this issue, a novel estimation algorithm has been proposed and accurate estimates can be obtained regardless of different nonlinear dynamics. Several methods have also been derived to improve the separation gap estimation in Casimir oscillator which is a modified AFM system. x

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Development of a new signal processor for tetralateral position sensitive detector based on single-chip microcomputer

Cited by 6 publications

References 1 publication

The effect of spot size on linearity improvement of tetra-lateral position sensitive detector

The effect of spot size on linearity improvement of tetra-lateral position sensitive detector

A Study of 2D Contour Measurement System at Tool Center Point of Machine Tools

High performance nano-scale measurements by advanced atomic force estimation

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