Development of a novel two-DOF piezo-driven fast steering mirror with high stiffness and good decoupling characteristic

Chang, Qingbing; Chen, Weishan; Liu, Junkao; Yu, Hongpeng; Deng, Jie; Liu, Yingxiang

doi:10.1016/j.ymssp.2021.107851

Cited by 47 publications

(13 citation statements)

References 34 publications

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“…As shown in Figure 7a, the direct deformation type MPRs take the deformations of their piezoelectric elements as the motion [173] Copyright 2021, Elsevier. c) A direct deformation type MPR driven by a piezoelectric sandwich beam.…”

Section: The Direct Driving Type Mprsmentioning

confidence: 99%

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Developments and Challenges of Miniature Piezoelectric Robots: A Review

Li,

Deng,

Zhang

et al. 2023

Advanced Science

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Miniature robots have been widely studied and applied in the fields of search and rescue, reconnaissance, micromanipulation, and even the interior of the human body benefiting from their highlight features of small size, light weight, and agile movement. With the development of new smart materials, many functional actuating elements have been proposed to construct miniature robots. Compared with other actuating elements, piezoelectric actuating elements have the advantages of compact structure, high power density, fast response, high resolution, and no electromagnetic interference, which make them greatly suitable for actuating miniature robots, and capture the attentions and favor of numerous scholars. In this paper, a comprehensive review of recent developments in miniature piezoelectric robots (MPRs) is provided. The MPRs are classified and summarized in detail from three aspects of operating environment, structure of piezoelectric actuating element, and working principle. In addition, new manufacturing methods and piezoelectric materials in MPRs, as well as the application situations, are sorted out and outlined. Finally, the challenges and future trends of MPRs are evaluated and discussed. It is hoped that this review will be of great assistance for determining appropriate designs and guiding future developments of MPRs, and provide a destination board to the researchers interested in MPRs.

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Section: The Direct Driving Type Mprsmentioning

confidence: 99%

mentioning

confidence: 99%

Developments and Challenges of Miniature Piezoelectric Robots: A Review

Li,

Deng,

Zhang

et al. 2023

Advanced Science

Self Cite

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“…Shijing and Yingxiang Liu et.al. [20] developed a novel two-axis piezoelectric tilting mirror to assist the optical micromanipulation. A cross-shaped piezoelectric composite beam based on simple bonded type bimorphs was applied to their design, and the experiments revealed its features of fast response, high positioning accuracy, and feasible motion tracking capacity.…”

Section: Introductionmentioning

confidence: 99%

Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented Mirrors

Yin

Qin

et al. 2023

Micromachines

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An active optical system with three segmented mirrors was proposed to verify the co-focus and co-phase progress. In this system, a kind of large-stroke and high-precision parallel positioning platform was specially developed to help support the mirrors and reduce the error between them, which can move in three degrees of freedom out of plane. The positioning platform was composed of three flexible legs and three capacitive displacement sensors. For the flexible leg, a kind of forward-type amplification mechanism was specially designed to amplify the displacement of the piezoelectric actuator. The output stroke of the flexible leg was no less than 220 μm and the step resolution was up to 10 nm. Further, a linear model was established to identify the amplification ratio between the actuator and the flexible leg, which can increase the precision of the positioning platform. Moreover, three capacitive displacement sensors with a resolution of 2.5 nm were symmetrically installed in the platform to accurately measure the position and attitude of the platform. To improve the stability and precision of the platform, particle swarm optimization algorithm was applied to identify the control matrix, which can help the platform achieve ultra-high precision positioning. The results showed that the theoretical matrix parameters had a maximum deviation of 5.67% from the experimental ones. Finally, abundant experiments verified the excellent and stable performance of the platform. The results proved that while bearing the heavy mirror, which is no more than 5 kg, the platform can realize a 220 μm translation stroke and 2.0 mrad deflection stroke, with a high step resolution of 20 nm and 0.19 μrad. These indicators can perfectly cater to the requirements of the proposed segmented mirror system’s co-focus and co-phase adjustment progress.

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“…Thus, a smaller and cheaper actuator is desirable for the realization of this type of mirror, and a spring-supported scanning mirror has been considered as an alternative to the rotating polygon mirror. Electrostatic force [13][14][15][16], electrothermal force [17][18][19][20], electromagnetic force [21][22][23][24][25][26], and piezoelectric force [27][28][29][30][31][32] have been studied as the driving principles of the mirrors. Among these, electrostatic, electromagnetic, and piezoelectric drives are promising based on their response speed.…”

Section: Introductionmentioning

confidence: 99%

“…In addition, an electromagnetic scanner developed by a research team at Sogang University contains an 8 mm square mirror and a deflection angle of 8.0 • [25]. In the literature pertaining to the piezoelectric drive, scanners with stacked actuators have been reported as commercial products [30]. Generally, these scanners have small scanning angles and high resonance frequencies.…”

Section: Introductionmentioning

confidence: 99%

Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner

Ozaki

Ohta

Fujiyoshi

2022

Sensors

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Laser scanners with mechanically driven mirrors have exhibited increasing potential for various applications, such as displays and laser radar. Resonant scanners are the predominantly used scanners; however, non-resonant scanners are required for applications where point-to-point driving is desirable. Because a non-resonant drive cannot amplify the drive angle owing to the resonance phenomenon, high values are difficult to achieve for the main performance metrics of the scanners: mirror area, drive angle, and operating frequency. In this paper, we present a two-axis scanner with a piezoelectric actuator made of a piezoelectric single-crystal Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 as the actuation force source. The scanner contains a circular mirror with a diameter of 7 mm and achieves an average static mechanical deflection angle amplitude of 20.8° in two axes with a resonant frequency of 559 Hz. It is equipped with a transmission mechanism that can decouple each axis to achieve high linearity; in our study, the nonlinearity error was less than 1°.

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Development of a novel two-DOF piezo-driven fast steering mirror with high stiffness and good decoupling characteristic

Cited by 47 publications

References 34 publications

Developments and Challenges of Miniature Piezoelectric Robots: A Review

Developments and Challenges of Miniature Piezoelectric Robots: A Review

Design and Parameter Identification for a Positioning Platform with a Large Stroke and High Precision for Segmented Mirrors

Highly Linear and Wide Non-Resonant Two-Degree-of-Freedom Piezoelectric Laser Scanner

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