Development of a Practical Scanning Acoustic Microscopy

Abstract

Scanning acoustic microscopy (SAM) is a powerful non-destructive testing tool used in electronic, material and medical testing area. Commercial SAM products are generally too expensive to be extended to common users. Therefore, a practical SAM system had been developed using high-frequency ultrasonic focus transducers, a wide-band pulse transmitter/receiver, a high-speed data acquisition card, and a high-precision motion system. The SAM system's precision and function can meet the requirement of practical test adequately, and the cost is much lower compared to commercial products. Several kinds of imaging method were introduced, and the SAM system has the ability to accomplish full-wave data acquisition.

Detection Resolution Analysis of Scanning Acoustic Microscopy Used in Electronic Packaging

“…A gating system selects useful recieved signals to display. This transmit-receive-gate-display process is replicated hundreds of times over as the transducer passes over the sample line-by-line and then an acoustic C-scan image of the sample is created by the computer [8]. The appearence of SAM system is shown in Fig.…”

Properties of Films Characterized by Scanning Acoustic Microscope

“…The scanning acoustic microscopy (SAM) is potential non-destructive testing equipment, which takes advantage of high-frequency focused ultrasonic to detect the internal and sub-surface structure of specimens non-destructively [1] . It can not only detect micron flaws at different depths (from surface to tens of millimeters depth) with high sensitivity and high precision, but also be used for the detection of film because of the superiority of time-resolving ability [2] . In this paper, we proposed a method to determine the properties of film by high-frequency ultrasonic based on the SAM.…”