Development of a Thermoelectric Energy Generator Chip of Small Layout and High Power/Voltage Factors by Foundry Service

Yang, Shih-Ming; Wang, J. Y.; Chen, M. D.; Tsai, Ming-Fu

doi:10.1109/jsen.2019.2924256

Cited by 12 publications

(5 citation statements)

References 17 publications

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“…This heightened T diff amplifies the thermoelectric effect, leading to increase output voltage and enhance power generation capability. The fabrication process of the MTG is simpler when compared to the methods employed by Huesgen et al [22], Yan et al [24], Chen et al [26], Yuan et al [27] and Yang et al [28]. Moreover, our approach achieves a higher power factor than that reported by Kao et al [23], Yan et al [24], and Chen et al [26].…”

Section: Introductionmentioning

confidence: 69%

“…Additionally, the high thermal resistance poses challenges in certain heat source scenarios. Yang et al [28] presented an MTG chip fabricated using a semiconductor foundry service. This chip incorporated innovative features for enhanced performance, including a polysilicongermanium layer for improved thermoelectric efficiency, an isolation cavity for better thermal insulation, and structural support to enhance TC stability.…”

Section: Introductionmentioning

confidence: 99%

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Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples

Dai,

Chen,

Chiu

et al. 2024

J. Micromech. Microeng.

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The study explores the fabrication and evaluation of a micro thermoelectric generator (MTG) with long-length thermocouples through the utilization of a commercial complementary metal oxide semiconductor (CMOS) process. The MTG consists of 23 thermocouples, and its performance is intricately linked to the temperature difference (Tdiff) between the cold and hot sides of these thermocouples. An increase in Tdiff leads to higher output voltage and power for the MTG. To enhance Tdiff, the thermocouples are designed to be 700 µm in length, and an innovative design has been implemented on the cold side of the thermocouples, creating a suspended structure to improve heat dissipation A post-process is essential for achieving this suspended thermocouple structure. The results demonstrate that the thermocouple structure is fully suspended and remains undamaged. The measured outcomes reveal an output voltage of 13.8 mV when the Tdiff reaches 3.5 K. Under these conditions, the MTG exhibits a voltage factor of 2.76 mV/mm²K. Furthermore, at a Tdiff of 3.5 K, the maximum output power reaches 2.1 nW. The MTG demonstrates a power factor of 0.12 nW/mm²K².

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Section: Introductionmentioning

confidence: 69%

Section: Introductionmentioning

confidence: 99%

Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples

Dai,

Chen,

Chiu

et al. 2024

J. Micromech. Microeng.

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“…Despite its standard limited performances, still, silicon has found applications in microharvesters where its integrability has prevailed over its fair efficiency [ 81 , 82 , 83 , 84 ]. The availability of low-cost, integrated microTEGs is largely considered a key enabling technology supporting the development of the Internet of Things (IoT).…”

Section: Low-temperature Applicationsmentioning

confidence: 99%

“…Prototypes anticipating this path have been recently reviewed by Yan [ 82 ] and Jaziri et al [ 94 ]. Important advances on the route of making integrated TEGs fully compatible with standard microelectronic technologies were presented by Yang et al [ 84 , 95 ]. Differently from most previous implementations [ 81 , 93 ], in this case, the device was designed adapting a well-established BiCMOS (Bipolar Complementary Metal-Oxide-Semiconductor) layout.…”

Section: Low-temperature Applicationsmentioning

confidence: 99%

Recent Advances on Thermoelectric Silicon for Low-Temperature Applications

Narducci

Giulio

2022

Materials

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Silicon is the most widely used functional material, as it is geo-abundant and atoxic. Unfortunately, its efficiency as a thermoelectric material is very poor. In this paper, we present and discuss advances of research on silicon and related materials for thermoelectric applications, mostly focusing on the comparison between the two strategies deployed to increase its performance, namely either reducing its thermal conductivity or, in polycrystalline materials, increasing its power factor. Special attention will be paid to recent results concerning silicon thin films. The enhancement of Si performances has motivated efforts to develop integrated heat microharvesters operating around room temperature, which will be reviewed also in view of their applications to power wireless sensors for the Internet of Things.

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“…The fabrication of a hybrid µ-TEG is challenging due to the need to create vacuum cavities to eliminate parasitic thermal resistance. Such designs have been explored with CMOS [19] and MEMS-based [20] fabrication setups but with poly-Si and SiGe thin films. The MEMS-based approach relies on wafer bonding as a tool to create vacuum cavities on both sides of the thermoelectric thin films.…”

Section: Introductionmentioning

confidence: 99%

Development of MEMS Process Compatible (Bi,Sb)2(Se,Te)3-Based Thin Films for Scalable Fabrication of Planar Micro-Thermoelectric Generators

Bhatnagar

Vashaee

2022

Micromachines

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Bismuth telluride-based thin films have been investigated as the active material in flexible and micro thermoelectric generators (TEGs) for near room-temperature energy harvesting applications. The latter is a class of compact printed circuit board compatible devices conceptualized for operation at low-temperature gradients to generate power for wireless sensor nodes (WSNs), the fundamental units of the Internet-of-Things (IoT). CMOS and MEMS compatible micro-TEGs require thin films that can be integrated into the fabrication flow without compromising their thermoelectric properties. We present results on the thermoelectric properties of (Bi,Sb)2(Se,Te)3 thin films deposited via thermal evaporation of ternary compound pellets on four-inch SiO2 substrates at room temperature. Thin-film compositions and post-deposition annealing parameters are optimized to achieve power factors of 2.75 mW m−1 K−2 and 0.59 mW m−1 K−2 for p-type and n-type thin films. The measurement setup is optimized to characterize the thin-film properties accurately. Thin-film adhesion is further tested and optimized on several substrates. Successful lift-off of p-type and n-type thin films is completed on the same wafer to create thermocouple patterns as per the target device design proving compatibility with the standard MEMS fabrication process.

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Development of a Thermoelectric Energy Generator Chip of Small Layout and High Power/Voltage Factors by Foundry Service

Cited by 12 publications

References 17 publications

Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples

Manufacturing and measurement of CMOS-MEMS-based micro thermoelectric generators with long-length thermocouples

Recent Advances on Thermoelectric Silicon for Low-Temperature Applications

Development of MEMS Process Compatible (Bi,Sb)2(Se,Te)3-Based Thin Films for Scalable Fabrication of Planar Micro-Thermoelectric Generators

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