“…Tactile sensors proposed and developed based on micromachining are classified to piezoresistive (Kobayashi & Sagisawa, 1991;Ohka et al, 1990;Horie et al, 1995;Nguyen et al, 2004;Takao et al, 2005) and capacitive (Esashi et al, 1990;Kane et al, 2000;Suzuki et al, 1990;Lee et al, 2006). In dynamic measurement, piezoelectric type is also applicable (Yagi, 1991;Matsushita et al, 2004 Izutani et al, 2004;Aoyagi et al, 2005) and a flexible tactile sensor of arrayed capacitive type (Aoyagi & Tanaka, 2007;Ono et al, 2008), which are described in the next section in detail. In the reported micromachined tactile sensors, the force sensing elements are distributed two dimensionally on a surface.…”