2002
DOI: 10.1299/jsmemecjo.2002.5.0_283
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Development of Micro : Roughness Measuring Probe

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“…6 shows that the Furthermore a lower force measurement range has been investigated which is shown in Fig. 7 [5]. From this it can be concluded that the total useful measuring force ranges from 1 mN to 1 mN.…”
Section: Sensitivity Testmentioning
confidence: 91%
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“…6 shows that the Furthermore a lower force measurement range has been investigated which is shown in Fig. 7 [5]. From this it can be concluded that the total useful measuring force ranges from 1 mN to 1 mN.…”
Section: Sensitivity Testmentioning
confidence: 91%
“…The damage that the measuring force gives to an artifact was investigated [5]. Aluminum is selected as material and a surface after tracing was checked by SEM.…”
Section: Evaluation Of Measurement Damagementioning
confidence: 99%