“…Inhibition of the transport of volatiles, such as O 2 , H 2 O and CO 2 , is a necessity to assure satisfactory performance of polymeric products in the food and pharmaceutical packaging industries, as well as in protection of organic light‐emitting devices . Especially for packaging applications, it is desired to have thin transpartent coatings that can replace traditional metal barrier layers, while maintaining target permeability values for consumer products to ensure the necessary shelf‐life . Plasma‐enhanced chemical vapor deposition (PE‐CVD) of glass‐like silicon‐based ultrathin coatings is a widespread technique to be used in industrial production lines due to its several advantages, such as applicability to complex shapes, low cost and high deposition rate .…”