Conductance‐voltage (G ‐V) and current‐voltage (J ‐V) measurements were applied to reveal the tunneling mechanisms of GaAs ultra‐shallow sidewall tunnel junctions, which were fabricated by molecular layer epitaxy. From the G ‐V results, peaks were detected at 2, 12 and 14 THz at 6 K. In the J ‐V measurements, the fine structure near the peak voltage and a step in the tunneling current in the negative resistance region can also be observed. The tunneling mechanism is discussed in terms of the band transition, deep level and phonon‐assisted tunneling. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)