2007
DOI: 10.1016/j.mee.2007.01.160
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Device optimization of the FinFET having an isolated n+/p+ strapped gate

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“…9,10) However, the electrical properties of scaled-down conventional NVM devices have serious problems due to the short channel effect (SCE), tunneling effect or leakage current at the oxide/ silicon heterointerface, and the coupling capacitance between cells. 11) Fin field effect transistor (FinFET) structures have emerged as excellent candidates for applications in next-generation NVM devices because of their good SCE immunity, high read current, and high punch-through margin. 12,13) NVM devices with a double-gate structure have been studied in order to achieve high performance and low power consumption.…”
Section: Introductionmentioning
confidence: 99%
“…9,10) However, the electrical properties of scaled-down conventional NVM devices have serious problems due to the short channel effect (SCE), tunneling effect or leakage current at the oxide/ silicon heterointerface, and the coupling capacitance between cells. 11) Fin field effect transistor (FinFET) structures have emerged as excellent candidates for applications in next-generation NVM devices because of their good SCE immunity, high read current, and high punch-through margin. 12,13) NVM devices with a double-gate structure have been studied in order to achieve high performance and low power consumption.…”
Section: Introductionmentioning
confidence: 99%