Diamond deposition on modified silicon substrates: Making diamond atomic force microscopy tips for nanofriction experiments

Tanasa, G Gheorge; Kurnosikov, O Oleg; Flipse, Cfj Kees; Buijnsters, Josephus Gerardus; Enckevort, van Wjp

doi:10.1063/1.1590058

Cited by 13 publications

(10 citation statements)

References 30 publications

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“…These tip degradations and wear can be identified and quantified to improve the experimental results [98]. Coating a silicon tip can reduce the wear such as SiO 2 tip encapsulation [99], platinum silicide [100], and diamond particles [101][102][103]. Another way of reducing wear using molding technique has also been reported to fabricate monolithic ultra-sharp tips of DLC with Si (Si-DLC) [104].…”

Section: Silicon: the Most Widely Used Semiconductor Materials In The mentioning

confidence: 99%

Atomic and Close-to-Atomic Scale Manufacturing: A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy

Mathew

Rodriguez

2020

Nanomanuf Metrol

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Manufacturing at the atomic scale is the next generation of the industrial revolution. Atomic and close-to-atomic scale manufacturing (ACSM) helps to achieve this. Atomic force microscopy (AFM) is a promising method for this purpose since an instrument to machine at this small scale has not yet been developed. As the need for increasing the number of electronic components inside an integrated circuit chip is emerging in the present-day scenario, methods should be adopted to reduce the size of connections inside the chip. This can be achieved using molecules. However, connecting molecules with the electrodes and then to the external world is challenging. Foundations must be laid to make this possible for the future. Atomic layer removal, down to one atom, can be employed for this purpose. Presently, theoretical works are being performed extensively to study the interactions happening at the molecule–electrode junction, and how electronic transport is affected by the functionality and robustness of the system. These theoretical studies can be verified experimentally only if nano electrodes are fabricated. Silicon is widely used in the semiconductor industry to fabricate electronic components. Likewise, carbon-based materials such as highly oriented pyrolytic graphite, gold, and silicon carbide find applications in the electronic device manufacturing sector. Hence, ACSM of these materials should be developed intensively. This paper presents a review on the state-of-the-art research performed on material removal at the atomic scale by electrochemical and mechanical methods of the mentioned materials using AFM and provides a roadmap to achieve effective mass production of these devices.

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Section: Silicon: the Most Widely Used Semiconductor Materials In The mentioning

confidence: 99%

Atomic and Close-to-Atomic Scale Manufacturing: A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy

Mathew

Rodriguez

2020

Nanomanuf Metrol

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“…TBN of nanoelectronics or lithographic masks requires the tip to scan long distances over hard surfaces such as silicon, silicon dioxide, quartz, or various metals. A number of tip materials and tip coatings have been suggested to reduce tip wear, including silicon dioxide tip encapsulation, platinum silicide tips, and various forms of carbon including diamond. − Diamond tips have the advantage of high stiffness and strength, low chemical reactivity and adhesion, low friction coefficient, and can be either electrically insulating or conducting if doped . Typical diamond probes are fabricated by growing a thick diamond coating into a lithographically defined silicon wafer mold, which is not well-suited to the electronic integration required for arrays of independently controlled tips.…”

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confidence: 99%

Wear-Resistant Diamond Nanoprobe Tips with Integrated Silicon Heater for Tip-Based Nanomanufacturing

et al. 2010

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We report exceptional nanoscale wear and fouling resistance of ultrananocrystalline diamond (UNCD) tips integrated with doped silicon atomic force microscope (AFM) cantilevers. The resistively heated probe can reach temperatures above 600 degrees C. The batch fabrication process produces UNCD tips with radii as small as 15 nm, with average radius 50 nm across the entire wafer. Wear tests were performed on substrates of quartz, silicon carbide, silicon, or UNCD. Tips were scanned for more than 1 m at a scan speed of 25 mum s(-1) at temperatures ranging from 25 to 400 degrees C under loads up to 200 nN. Under these conditions, silicon tips are partially or completely destroyed, while the UNCD tips exhibit little or no wear, no signs of delamination, and exceptional fouling resistance. We demonstrate nanomanufacturing of more than 5000 polymer nanostructures with no deterioration in the tip.

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“…4 and showed great potential in scanning probe microscope (SPM) based nanofabrications, such as dip-pen lithography, 5,6 laser assisted SPM nanostructuring [7][8][9] and nanografting. 10 Conventional techniques for DLC deposition on sharp tips include hot-filament chemical vapor deposition, 11,12 microwave plasma chemical vapor deposition, 13 filtered catholic vacuum arc deposition, 14 and pulsed laser deposition.…”

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confidence: 99%

Laser-assisted nanoscale deposition of diamond-like carbon films on tungsten tips

Shi

Cherukuri

et al. 2004

Applied Physics Letters

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Diamond-like carbon (DLC) films were deposited on tungsten tips under KrF excimer laser irradiation in benzene solution. The deposition process was found to be highly dependent on tip sharpness. Tips with larger curvature radii and smaller aspect ratios could not be coated with DLC films under the same condition as that for sharp tips. Raman spectra showed that more sp3 tetrahedral structures were present in the DLC films on a tip with a smaller curvature radius. Simulation results showed that the tip sharpness dependent local optical enhancement played an important role in the DLC deposition process. An optical field gradient from apex to tip body was also found in the simulation. We suggest that there are two modes in the process of DLC deposition on nanotips under different laser fluences, i.e., local apex DLC deposition under low laser fluences and phase-graded DLC deposition under high laser fluences.

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Diamond deposition on modified silicon substrates: Making diamond atomic force microscopy tips for nanofriction experiments

Cited by 13 publications

References 30 publications

Atomic and Close-to-Atomic Scale Manufacturing: A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy

Atomic and Close-to-Atomic Scale Manufacturing: A Review on Atomic Layer Removal Methods Using Atomic Force Microscopy

Wear-Resistant Diamond Nanoprobe Tips with Integrated Silicon Heater for Tip-Based Nanomanufacturing

Laser-assisted nanoscale deposition of diamond-like carbon films on tungsten tips

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