Diamond-like carbon films prepared with a laser ion source

Abstract

Diamond-like carbon films have been deposited onto clean, unseeded substrates using a hybrid ion beam technique. In this method the ion fluences available for acceleration were particularly enhanced by the use of laser ablation plumes ejected from highly purified graphite targets. The combination of levels of purity characteristic of ultrahigh vacuum environments, large ratios of ion to neutral concentrations, and high fluences showed considerable merit for the growth of large-area (10 cm2 ) films of optical quality and uniformity at deposition rates approaching 20 μm/h.

Electron density and temperature measurements in a laser produced carbon plasma

“…Carbon thin films have been attracting both intensive theoretical and experimental investigation due to their diamondlike properties. [4][5][6][7][8] This technique is also utilized for fullerene synthesis in an ambient gas. [9][10][11] It is a potential method for many possible new, yet to be defined technological applications.…”

The formation of diamond-like carbon film at atmospheric pressure by the pulsed laser/plasma hybrid deposition method

“…A variety of the techniques has been developed to form the diamond-like carbon film in literature [1][2][3][4][5][6]. Pulsed laser deposition (PLD) is one of the methods with laser energy for DLC film deposition application in low pressure [4,5].…”

“…A variety of the techniques has been developed to form the diamond-like carbon film in literature [1][2][3][4][5][6]. Pulsed laser deposition (PLD) is one of the methods with laser energy for DLC film deposition application in low pressure [4,5]. According to the findings in references [7], the amount of the sp 3 bonding in the amorphous carbon could be significantly increased by the raise of the kinetic energy during the laser deposition process, and the mechanical properties of the DLC films would be improved with the increase of the sp 3 bonding on a low temperature substrate.…”

Emission characteristics and dynamics of C2 from laser produced graphite plasma

“…[5][6][7][8][9][10][11][12] However, the underlying physics and chemistry of the processes such as carbon cluster formation or their dissociation are less than well understood. Further, the details of the dynamics of laser interaction with materials are extremely important in the context of optimizing the conditions for depositing good quality thin films.…”