Diamond Nucleation by Carbon Transport from Buried Nanodiamond TiO<sub>2</sub> Sol‐Gel Composites

Daenen, Michaël; Zhang, Liang; Erni, Rolf; Williams, Oliver A.; Hardy, An; Bael, Marlies K. Van; Wagner, Patrick; Haenen, Ken; Nesládek, Miloš; Tendeloo, Gustaaf Van

doi:10.1002/adma.200802305

Cited by 31 publications

(26 citation statements)

References 24 publications

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“…Typical conditions for microwave plasma assisted growth of diamond films are a mixture of a hydrocarbon and hydrogen with a very low proportion of hydrocarbon and a substrate temperature of about 600-1000ºC [2,3,4]. From the point of view of the material structure and properties, it is important to develop a wide range of technologies allowing growth of thin films from ultra nanocrystalline diamond -UNCD -(i.e continuously renucleating) to nanocrystalline diamond -NCD -(columnar) type of diamond growth [5].…”

Section: Introductionmentioning

confidence: 99%

Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

Fendrych¹,

Taylor²,

Peksa³

et al. 2010

J. Phys. D: Appl. Phys.

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, et al.. Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system. Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43 (37) Abstract. Industrial applications of PE CVD diamond grown on large area substrates, 3D shapes, at low substrate temperatures and on standard engineering substrate materials require novel plasma concepts. Based on the pioneering work of the group at AIST in Japan, highdensity coaxial delivery type of plasmas have been explored [1]. However, an important challenge is to obtain commercially interesting growth rates at very low substrate temperatures. In the presented work we introduce the concept of novel linear antenna sources, designed at Leybold Optics Dresden, using high-frequency pulsed MW discharge with a high plasma densitiy. This type of pulse discharges lead to the preparation of nanocrystalline diamond thin films, compared to ultra-nanocrystalline diamond thin films prepared in Ref [1]. We present OES data for the CH 4 -CO 2 -H 2 gas chemistry and we discuss the basic properties of the nanocrystalline diamond (NCD) films grown.

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Section: Introductionmentioning

confidence: 99%

Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

Fendrych¹,

Taylor²,

Peksa³

et al. 2010

J. Phys. D: Appl. Phys.

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“…A pure hydrogen plasma exposure series, using similar experimental conditions but without CH 4 was also performed in order to investigate the possible role of H 2 and its radicals on the sol-gel layer.…”

Section: Methodsmentioning

confidence: 99%

“…The interface material plays an important role in the diffusion process of carbon. Previous studies have indicated that high quality diamond films can be grown on UDD seeds buried under a sol-gel TiO 2 layer [4]. However, mapping of the amorphous carbon distribution on diamond was not performed in these investigations.…”

Section: Introductionmentioning

confidence: 99%

“…The development of chemical vapor deposition (CVD) techniques has allowed the outstanding properties of diamond films to be used in a wide field of technological applications [1][2][3][4][5]. Previous studies have demonstrated that when titanium surfaces are modified with a TiO 2 layer, the biocompatibility and the extent of bone-implant tolerance is increased [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

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Analytical TEM study of CVD diamond growth on TiO2 sol–gel layers

Verbeeck

Turner

et al. 2012

Diamond and Related Materials

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The early growth stages of chemical vapor deposition (CVD) diamond on a sol-gel TiO 2 film with buried ultra dispersed diamond seeds (UDD) have been studied. In order to investigate the diamond growth mechanism and understand the role of the TiO 2 layer in the growth process, high resolution transmission electron microscopy (HRTEM), energy-filtered TEM and electron energy loss spectroscopy (EELS) techniques were applied to cross sectional diamond film samples. We find evidence for the formation of TiC crystallites inside the TiO 2 layer at different diamond growth stages. However, there is no evidence that diamond nucleation starts from these crystallites. Carbon diffusion into the TiO 2 layer and the chemical bonding state of carbon (sp 2 /sp 3 ) were both extensively investigated. We provide evidence that carbon diffuses through the TiO 2 layer and that the diamond seeds partially convert to amorphous carbon during growth. This carbon diffusion and diamond to amorphous carbon conversion make the seed areas below the TiO 2 layer grow and bend the TiO 2 layer upwards to form the nucleation center of the diamond film. In some of the protuberances a core of diamond seed remains, covered by amorphous carbon. It is however unlikely that the remaining seeds are still active during the growth process. Crown

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“…17 Also, the use of so-called ultradispersed nanodiamond particles buried under a sol-gel TiO 2 layer resulted in an effective nucleation of NCD films. 18 Surprisingly, only few works reported on the use of metallic nucleation layers. In many earlier studies on the deposition of diamond thin films on ferrous and cemented carbide substrates, metallic interlayers were already employed to suppress the large uptake of carbon, to suppress the outdiffusion of highly reactive Fe and Co atoms, and to improve the adhesion of the diamond films on the substrate.…”

Section: Introductionmentioning

confidence: 99%

Enhancement of the nucleation of smooth and dense nanocrystalline diamond films by using molybdenum seed layers

Buijnsters

Vázquez

Dreumel

et al. 2010

Journal of Applied Physics

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A method for the nucleation enhancement of nanocrystalline diamond ͑NCD͒ films on silicon substrates at low temperature is discussed. A sputter deposition of a Mo seed layer with thickness 50 nm on Si substrates was applied followed by an ultrasonic seeding step with nanosized detonation diamond powders. Hot-filament chemical vapor deposition ͑HF-CVD͒ was used to nucleate and grow NCD films on substrates heated up at 550°C. The nucleation of diamond and the early stages of NCD film formation were investigated at different methane percentages in methane/ hydrogen gas mixtures by atomic force microscopy, micro-Raman spectroscopy, scanning electron microscopy, and grazing incidence x-ray analyses in order to gain specific insight in the nucleation process of NCD films. The nucleation kinetics of diamond on the Mo-coated Si substrates was found to be up to ten times higher than on blank Si substrates. The enhancement of the nucleation of diamond on thin Mo interlayers results from two effects, namely, ͑a͒ the nanometer rough Mo surface shows an improved embedding of ultrasonically introduced nanosized diamond seeds that act as starting points for the diamond nucleation during HF-CVD and ͑b͒ the rapid carbonization of the Mo surface causes the formation of Mo 2 C onto which diamond easily nucleates. The diamond nucleation density progressively increases at increasing methane percentages and is about 5 ϫ 10 10 cm −2 at 4.0% methane. The improved nucleation kinetics of diamond on Mo interlayers facilitates the rapid formation of NCD films possessing a very low surface roughness down to ϳ6 nm, and allows a submicron thickness control.

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Diamond Nucleation by Carbon Transport from Buried Nanodiamond TiO₂ Sol‐Gel Composites

Cited by 31 publications

References 24 publications

Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

Analytical TEM study of CVD diamond growth on TiO2 sol–gel layers

Enhancement of the nucleation of smooth and dense nanocrystalline diamond films by using molybdenum seed layers

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Diamond Nucleation by Carbon Transport from Buried Nanodiamond TiO2 Sol‐Gel Composites

Cited by 31 publications

References 24 publications

Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

Analytical TEM study of CVD diamond growth on TiO2 sol–gel layers

Enhancement of the nucleation of smooth and dense nanocrystalline diamond films by using molybdenum seed layers

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Diamond Nucleation by Carbon Transport from Buried Nanodiamond TiO₂ Sol‐Gel Composites