Abstract:The growth of nanocrystalline diamond (NCD) has attracted many researchers because of the combination of advanced intrinsic properties such as their smooth surface, excellent optical, mechanical, and thermal properties, biocompatibility, high affinity for covalent bonding with specific organic molecules, and chemical inertness. [1][2][3] Low-cost insulating (nominally undoped) and semiconducting (boron-doped) nanocrystalline diamond films can be deposited on large areas [4] and thus new fields for their bioel… Show more
“…The substrates had been washed for 5 minutes in an ultrasonic bath using acetone and 2-isopropanol. Next, they had been seeded for 1 hour by sonication in a commercially available diamond suspension with a grain size of 5-20 nm (Blue-seeds, ITC, USA) [31,32]. Then the substrates were washed again in 2-isopropanol and dried in a stream of nitrogen.…”
Section: Deposition Of Boron-doped Diamond Filmsmentioning
A conductive boron-doped diamond (BDD) grown on a fused silica/quartz has been investigated. Diamond thin films were deposited by the microwave plasma enhanced chemical vapor deposition (MW PECVD). The main parameters of the BDD synthesis, i.e. the methane admixture and the substrate temperature were investigated in detail. Preliminary studies of optical properties were performed to qualify an optimal CVD synthesis and film parameters for optical sensing applications. The SEM micro-images showed the homogenous, continuous and polycrystalline surface morphology; the mean grain size was within the range of 100-250 nm. The fabricated conductive boron-doped diamond thin films displayed the resistivity below 500 mOhm cm -1 and the transmittance over 50% in the VIS-NIR wavelength range. The studies of optical constants were performed using the spectroscopic ellipsometry for the wavelength range between 260 and 820 nm. A detailed error analysis of the ellipsometric system and optical modelling estimation has been provided. The refractive index values at the 550 nm wavelength were high and varied between 2.24 and 2.35 depending on the percentage content of methane and the temperature of deposition.
“…The substrates had been washed for 5 minutes in an ultrasonic bath using acetone and 2-isopropanol. Next, they had been seeded for 1 hour by sonication in a commercially available diamond suspension with a grain size of 5-20 nm (Blue-seeds, ITC, USA) [31,32]. Then the substrates were washed again in 2-isopropanol and dried in a stream of nitrogen.…”
Section: Deposition Of Boron-doped Diamond Filmsmentioning
A conductive boron-doped diamond (BDD) grown on a fused silica/quartz has been investigated. Diamond thin films were deposited by the microwave plasma enhanced chemical vapor deposition (MW PECVD). The main parameters of the BDD synthesis, i.e. the methane admixture and the substrate temperature were investigated in detail. Preliminary studies of optical properties were performed to qualify an optimal CVD synthesis and film parameters for optical sensing applications. The SEM micro-images showed the homogenous, continuous and polycrystalline surface morphology; the mean grain size was within the range of 100-250 nm. The fabricated conductive boron-doped diamond thin films displayed the resistivity below 500 mOhm cm -1 and the transmittance over 50% in the VIS-NIR wavelength range. The studies of optical constants were performed using the spectroscopic ellipsometry for the wavelength range between 260 and 820 nm. A detailed error analysis of the ellipsometric system and optical modelling estimation has been provided. The refractive index values at the 550 nm wavelength were high and varied between 2.24 and 2.35 depending on the percentage content of methane and the temperature of deposition.
“…The structured films are required for applications like protective layers on transistors [7] or advanced hybrid MEMS devices [8]. The micro-structured diamond films are also used for tissue engineering [9][10][11].…”
“…In recent years, ultrasonic treatment using ultradispersed detonation diamond represents the most perspective pretreatment method that is easily applied to substrates with a complex geometry and shape (Williams et al , 2007;Kromka et al , 2009a). From the broad range of bombardment and irradiation pretreatments, ion bombardment is the most promising alternative allowing the heteroepitaxial growth of diamond fi lms on iridium substrates (Schreck et al , 1997).…”
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