2018
DOI: 10.1007/s00339-018-2093-4
|View full text |Cite
|
Sign up to set email alerts
|

Dielectric constant measurement using atomic force microscopy of dielectric films: a system theory approach

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
3
0

Year Published

2019
2019
2024
2024

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 5 publications
(3 citation statements)
references
References 16 publications
0
3
0
Order By: Relevance
“…The surface potential ( V s ) was calculated from the CPD of Figure S8. The capacitances for metal and dielectric samples are calculated by using the two equations , where z , R , h and θ are the distance between tip and sample, the radius of the tip, the thickness of the dielectrics, and the cone angle of the tip apex, respectively. Combining eqs , and yields the capacitive force exerted on the tip as follows for metal for dielectric.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The surface potential ( V s ) was calculated from the CPD of Figure S8. The capacitances for metal and dielectric samples are calculated by using the two equations , where z , R , h and θ are the distance between tip and sample, the radius of the tip, the thickness of the dielectrics, and the cone angle of the tip apex, respectively. Combining eqs , and yields the capacitive force exerted on the tip as follows for metal for dielectric.…”
Section: Resultsmentioning
confidence: 99%
“…The surface potential (V s ) was calculated from the CPD of Figure S8. The capacitances for metal and dielectric samples are calculated by using the two equations 44,45…”
mentioning
confidence: 99%
“…The 2D GaO X bilayer exhibited dielectric breakdown voltages of ±6 V. The dielectric constant (6.5) of the 2D GaO X bilayer was evaluated via F–D spectroscopy and KPFM (Figure S7). The dielectric constant of a thin insulating film can be estimated by using the equation F false( z false) = F 0 2 π ε 0 R 2 false( 1 sin .25em θ false) true( z + h ε normalr true) true( z + h ε normalr + R ( 1 sin θ ) true) false( V tip V normals false) 2 where F ( z ) is the capacitive force to the tip apex, F 0 is the force against the tip, ε 0 is the vacuum permittivity, R is the radius of the tip apex, θ is the cone angle of the tip apex, z is the distance between the tip and the sample, h is the thickness of the insulating film, ε r is the dielectric constant of the insulating film, V tip is the tip bias voltage, and V s is the surface potential. KPFM was performed on 2D GaO X bilayer and Au electrode to obtain the contact potential difference between the tip and the 2D GaO X bilayer (Figure S7a–c), which was used to determine the V s .…”
Section: Resultsmentioning
confidence: 99%