2003
DOI: 10.1063/1.1569052
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Dielectric function of nanocrystalline silicon with few nanometers (<3 nm) grain size

Abstract: The dielectric function of nanocrystalline silicon (nc-Si) with crystallite size in the range of 1 to 3 nm has been determined by spectroscopic ellipsometry in the range of 1.5 to 5.5 eV. ATauc-Lorentz parameterization is used to model the nc-Si optical properties. The nc-Si dielectric function can be used to analyze nondestructively nc-Si thin films where nanocrystallites cannot be detected by x-ray diffraction and Raman spectroscopy. During the last few years, nanocrystalline silicon (nc-Si) films have recei… Show more

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Cited by 64 publications
(27 citation statements)
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“…If the bands of the ×2 Si layer are not as well defined or if they are not parallel, the interband transitions are expected to be smoothed out. This is the case, for example, for 1-to 3-nm Si nanocrystallites, whose optical response is almost identical to amorphous Si [36]. Finally, the observed energy shift of the main absorption feature with respect to bulk amorphous silicon is likely related to the different environment of the silicon atoms in the SANRs, due to the reduced dimension of the silicon layer and to the presence of the Si-Ag interface.…”
Section: Determination Of the Optical Response Of The Si ×2 Sanr Lmentioning
confidence: 86%
“…If the bands of the ×2 Si layer are not as well defined or if they are not parallel, the interband transitions are expected to be smoothed out. This is the case, for example, for 1-to 3-nm Si nanocrystallites, whose optical response is almost identical to amorphous Si [36]. Finally, the observed energy shift of the main absorption feature with respect to bulk amorphous silicon is likely related to the different environment of the silicon atoms in the SANRs, due to the reduced dimension of the silicon layer and to the presence of the Si-Ag interface.…”
Section: Determination Of the Optical Response Of The Si ×2 Sanr Lmentioning
confidence: 86%
“…In Ref. [5], function 'L', a mixture of 1.5 nm mean radius Si nc's in an aSi matrix was deposited by MS. In Ref.…”
Section: Msmentioning
confidence: 99%
“…Although samples grown at substrate temperature between 50 ºC and 150 ºC look like amorphous by Raman analysis, the Er34 sample, has been extensively characterized by transmission electron microscopy (TEM) (see ref [5]) shows a volume fraction of 34% of silicon nanocrystallites with a size < 3nm embedded in an a-Si:H matrix. According to the Raman analysis, the as-grown erbium-doped silicon samples produced by RF sputtering can be separated into two groups, namely one group of samples having Si crystal sizes lower than 3 nm (Er34 and P13) and the other group having larger silicon crystals size (P17 and P25 samples).…”
Section: Resultsmentioning
confidence: 99%