2005
DOI: 10.1109/tim.2005.853352
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Differential Open Resonator Method for Permittivity Measurements of Thin Dielectric Film on Substrate

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Cited by 18 publications
(14 citation statements)
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“…At Colorado school of Mines (CSM) we use 3 mm wave (or sub‐THz) modalities to extract material properties: (1) a quasioptical system, [ Scales and Batzle , , ; Greeney and Scales , ] to study bulk properties; (2) a near‐field scanning system [ Weiss et al , ], to measure local properties; and (3) the open hemispherical cavity resonator [ Rahman et al , ; Dudorov et al , ], for samples that are too thin or too low loss for quasioptical techniques. In this work, using cavity resonance perturbation (Figure ), we extract the complex dielectric constants of clay‐thin films in 100–165 GHz and investigate electrical properties in the presence of Ca ++ /Na + ions.…”
Section: Methodsmentioning
confidence: 99%
“…At Colorado school of Mines (CSM) we use 3 mm wave (or sub‐THz) modalities to extract material properties: (1) a quasioptical system, [ Scales and Batzle , , ; Greeney and Scales , ] to study bulk properties; (2) a near‐field scanning system [ Weiss et al , ], to measure local properties; and (3) the open hemispherical cavity resonator [ Rahman et al , ; Dudorov et al , ], for samples that are too thin or too low loss for quasioptical techniques. In this work, using cavity resonance perturbation (Figure ), we extract the complex dielectric constants of clay‐thin films in 100–165 GHz and investigate electrical properties in the presence of Ca ++ /Na + ions.…”
Section: Methodsmentioning
confidence: 99%
“…while β 01 is the waveguide-cavity factor as reported in [5] and Z g represents the characteristic impedance of the transmission line equivalent to the rectangular waveguide excited in its fundamental mode TE 10 .…”
Section: Equivalent Circuit Model Of Open Resonator System For the Chmentioning
confidence: 99%
“…They include open-ended waveguide/coaxial probe methods [18], free-space techniques [16], stripline [20], transmission/reflection [4] and resonant [22] procedures, all having specific advantages and constraints. Among them, open resonator methods [10,11,13,15,17,25] give the most powerful tool to accurately retrieve the equivalent impedance properties of low-loss thin dielectric surfaces. In the standard resonator approach [25], approximate empirical formulas are adopted to obtain the surface impedance characterization from the knowledge of measured resonance parameters, such as the frequency shift and the cavity quality factor.…”
Section: Introductionmentioning
confidence: 99%
“…Various methods have been developed in millimeter and submillimeter frequency ranges to measure material properties (usually complex permittivity and permeability), e.g., the open resonator [3,4], free space [5][6][7][8][9][10], and reflection ellipsometry methods [11][12][13]. The open resonator method provides accurate material properties at discrete resonance frequencies.…”
Section: Introductionmentioning
confidence: 99%
“…Their bandwidths have been broadening and operating frequency bands have been moving to the submillimeter frequency range. Measurements of the electrical properties of EM materials have gained considerable importance, particularly in the millimeter and submillimeter frequency ranges, as material parameters are fundamental parameters in the natural and application sciences fields [1,2].Various methods have been developed in millimeter and submillimeter frequency ranges to measure material properties (usually complex permittivity and permeability), e.g., the open resonator [3,4], free space [5][6][7][8][9][10], and reflection ellipsometry methods [11][12][13]. The open resonator method provides accurate material properties at discrete resonance frequencies.…”
mentioning
confidence: 99%