Diffractive Optics Fabrication System for Large Aspheric Surface Testing

Rhee, Hyug-Gyo; Song, Jae-Bong; Kim, Dong Ik; Lee, Yun-Woo; Ha, Kwan-Soo

doi:10.3938/jkps.50.1032

Cited by 10 publications

(2 citation statements)

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“…Обратную связь для линейного двигателя обеспечивает лазерный интерферометр перемещения с погрешностью измерения не более 1 нм. Подобная конфигурация использована в предыдущих разработках ИАиЭ СО РАН и КТИ НП СО РАН [3-7], а также в ряде зарубежных экспериментальных систем [8][9][10]. Запись элементов в разработанной установке может осуществляться на двух длинах волн -266 и 532 нм.…”

Section: структура и принцип работы лазерных литографических системunclassified

Structure, Operating Principle and Perspective Development of Lithographic Systems for Synthesis of Planar Optical Elements

2020

Applied Photonics

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Представлены два сканирующих лазерных нанолитографа, разработанных в Институте автоматики и электрометрии СО РАН и работающих в прямоугольной и полярной системе координат. Описаны принципы работы данных нанолитографов, методы повышения их разрешающей способности, проанализированы перспективы и направления их развития. Продемонстрированы первые результаты записи регулярных тестовых решеток на пленках металлов.Ключевые слова: сканирующий лазерный нанолитограф, дифракционные решетки, тонкие металлические пленки, термохимическая лазерная запись.

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Section: структура и принцип работы лазерных литографических системunclassified

Structure, Operating Principle and Perspective Development of Lithographic Systems for Synthesis of Planar Optical Elements

2020

Applied Photonics

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“…The choice of exposure algorithms, technologies and materials for laser writing of precision computer-generated holograms (CGH) is largely determined by the design of the writing system used. Scanning laser lithographic systems (SLLS) described in the literature and used for the manufacturing the CGHs and micro-optical elements can be divided into two main groups: X-Y systems with a basic linear trajectory of the beam motion [ 1 , 2 , 3 ] and circular laser writing systems (CLWS) [ 4 , 5 , 6 , 7 , 8 , 9 , 10 ].…”

Section: Introductionmentioning

confidence: 99%

Diffractive Sensor Elements for Registration of Long-Term Instability at Writing of Computer-Generated Holograms

Shimansky

Belousov

Korolkov

et al. 2021

Sensors

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The research and development of methods using of the specialized diffractive microstructure sensors embedded in the pattern of computer-generated holograms (CGH) manufactured on circular and X-Y laser writing systems is discussed. These microstructures consist of two parts: one of which is written before the CGH in the field of future hologram and the second one is written during the long-term writing of the CGH. The shift between the first and second part of the microstructure is the trace of the writing errors and allows one to determine and calculate the error of CGH fabrication along both orthogonal coordinates. The developed method is based on the principle of diffraction-based overlay with 1D and 2D built-in diffractive microstructure-sensors. Mathematical modeling and results of experimental test writings of such diffractive microstructure sensors are described. The efficiency of using these types of build-in sensors for the writing errors estimation for CGHs is demonstrated.

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Improving Synthesis Accuracy of Topology Elements in Laser Pattern Generators with Circular Scanning Mode

Kir'yanov

Kiryanov

2019

Lecture Notes in Mechanical Engineering

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Diffractive Optics Fabrication System for Large Aspheric Surface Testing

Cited by 10 publications

References 0 publications

Structure, Operating Principle and Perspective Development of Lithographic Systems for Synthesis of Planar Optical Elements

Structure, Operating Principle and Perspective Development of Lithographic Systems for Synthesis of Planar Optical Elements

Diffractive Sensor Elements for Registration of Long-Term Instability at Writing of Computer-Generated Holograms

Improving Synthesis Accuracy of Topology Elements in Laser Pattern Generators with Circular Scanning Mode

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