2009
DOI: 10.1063/1.3190199
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Digital optical spectrometer-on-chip

Abstract: A concept of digital optical spectrometer-on-chip is proposed and results of their fabrication and characterization are reported. The devices are based on computer-designed digital planar holograms which involves millions of lines specifically located and oriented in order to direct output light into designed focal points according to the wavelength. Spectrometers were fabricated on silicon dioxide and hafnium dioxide planar waveguides using electron beam lithography and dry etching. Optical performances of de… Show more

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Cited by 39 publications
(16 citation statements)
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“…A photodetector array probes the spatial field distribution and converts it into spectral information of the optical input via a linear transformation. Classical dispersive spectrometers using diffractive gratings, prisms, or resonant cavity arrays as the spectrum-splitting elements fall in this category [5][6][7][8][9][10][11][12][13] . Furthermore, the generalized "dispersive" spectrometers shown in Fig.…”
Section: Performance Scaling In Chip-scale Spectroscopic Sensing Systemsmentioning
confidence: 99%
“…A photodetector array probes the spatial field distribution and converts it into spectral information of the optical input via a linear transformation. Classical dispersive spectrometers using diffractive gratings, prisms, or resonant cavity arrays as the spectrum-splitting elements fall in this category [5][6][7][8][9][10][11][12][13] . Furthermore, the generalized "dispersive" spectrometers shown in Fig.…”
Section: Performance Scaling In Chip-scale Spectroscopic Sensing Systemsmentioning
confidence: 99%
“…12 The DPH is etched into the core layer of a planar waveguide in order to produce a spatial modulation of the effective refractive index of the waveguide and to control the propagation of the light at the nanoscale. 12 The DPH is etched into the core layer of a planar waveguide in order to produce a spatial modulation of the effective refractive index of the waveguide and to control the propagation of the light at the nanoscale.…”
Section: Device Fabricationmentioning
confidence: 99%
“…9,10 In particular, a powerful technology based on the concept of CGWH is digital planar holography (DPH), 11,12 which allows for the encoding of the optical transfer function of the desired device into a planar hologram engraved in the core layer of a dielectric slab waveguide. A promising approach for the design of photonic devices is computer-generated waveguide holography (CGWH).…”
Section: Introductionmentioning
confidence: 99%
“…Spectral filters that selectively reflect or transmit the incident light are indispensable in various optical devices including spectrum analyzers, image sensors and wavelength demultiplexers. In a wide class of planar (integrated) optoelectronic systems, spectral or spatial filtering is performed in a slab waveguide [1][2][3][4][5][6][7]. Such geometry corresponds to the "insulator-oninsulator" platform and is suitable for the creation of fully integrated optical devices.…”
Section: Introductionmentioning
confidence: 99%