Direct Fabrication of Inkjet-Printed Dielectric Film 
for Metal–Insulator–Metal Capacitors

Cho, Cheng-Lin; Kao, Hsuan‐Ling; Wu, Yu‐Feng; Chang, Li; Cheng, Chun Hu

doi:10.1007/s11664-017-5832-y

Cited by 4 publications

(3 citation statements)

References 19 publications

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“…A reason for the reduced impedance magnitude and the phase angle differences of SiN insulated MEAs could be due to the dielectric properties of the passivation material. Because the relative permittivity of sputtered Si 3 N 4 (6.0) is twice as high as for SU8 (2.8–3.2 − ), the parasitic capacity of insulation covered circuit paths within the culture chamber is also increased. Additionally, as already reported, the thickness of the silicon nitride layer with 750 nm is much thinner than the SU8 layer with 2 μm, which contributes to an increased parasitic capacitance.…”

Section: Resultsmentioning

confidence: 99%

Reactive Sputtered Silicon Nitride as an Alternative Passivation Layer for Microelectrode Arrays in Sensitive Bioimpedimetric Cell Monitoring

Schmidt

Haensch

Frank

et al. 2021

ACS Appl. Mater. Interfaces

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Microelectrode arrays (MEAs) are widely used to study the behavior of cells noninvasively and in real time. While the design of MEAs focuses mainly on the electrode material or its application-dependent modification, the passivation layer, which is crucial to define the electrode area and to insulate the conducting paths, remains largely unnoticed. Because often most cells are in direct contact with the passivation layer rather than the electrode material, biocompatible photoresists such as SU-8 are almost exclusively used. However, SU-8 is not without limitations in terms of optical transmission, optimal cell support, or compatibility within polymer-based microfluidic lab on chip systems. Here, we established a silicon nitride (SiN) passivation by physical vapor deposition (PVD), which was optimized and evaluated for impedance spectroscopy-based monitoring of cells. Surface characteristics, biocompatibility, and electrical insulation capability were investigated and compared to SU8 in detail. To investigate the influence of the SiN passivation on the impedimetric analysis of cells, HEK-293 A and MCF-7 were chosen as adherent cell models and measured on microelectrodes of 50–200 μm in diameter. The results clearly revealed an overall suitability of SiN as alternative passivation. While for the smallest electrode size a cell line dependent comparable or slightly decreased cell signal could be observed in comparison with SU-8, a significant higher cell signal was observed for microelectrodes larger than 50 μm in diameter. Furthermore, a high suitability for the bonding of PEGDA and PDMS microfluidic structures on the SiN passivation layer without any leakage could be demonstrated.

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Section: Resultsmentioning

confidence: 99%

Reactive Sputtered Silicon Nitride as an Alternative Passivation Layer for Microelectrode Arrays in Sensitive Bioimpedimetric Cell Monitoring

Schmidt

Haensch

Frank

et al. 2021

ACS Appl. Mater. Interfaces

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“…For noncontact maskless patterning, one of the most promising alternatives is the inkjet-printing technique (IJP), which enables the deposition of different shapes and sizes of layers in printed electronics. Cho et al fabricated and realized IJP dielectric layers for a metal–insulator–metal (MIM) capacitor . IJP can deposit functional materials precisely following a computer-aided design (CAD) drawing.…”

Section: Introductionmentioning

confidence: 99%

Single-Step Inkjet-Printed Dielectric Template for Large Area Flexible Signage and Low-Information Displays

Kant,

Seetharaman,

Mahmood

et al. 2023

ACS Nano

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In recent years, the proliferation of smart gadgets has increased the demand for information displays; fortunately, organic light-emitting diodes (OLEDs) show great promise for use in display, lighting, and signage contexts. This research demonstrates inkjet printing of dielectric materials to provide maskless emission area patterning and electrical isolation for large-area OLEDs on flexible/rigid indium tin oxide (ITO)coated substrates, avoiding the need for typical photolithography steps, including etching and lift-off processes. We have studied the impact of impinged droplets' velocity fluctuations, which are measured in relation to their interaction with the substrate, allowing for the determination of the drop diameter and shape. The inkjet parameters, such as pulse waveform, pulse voltage, and pulse width, are controlled to provide consistently repeatable ejection of dielectric ink droplets. The single-step patterning of complex designs with a minimum opening of 18 μm features is successfully printed with high fidelity. The effect of substrate temperature on the printed template/structure size and shape is explored. We have successfully demonstrated an ultralarge-area (120 × 120 mm 2 ) OLED signage application on inkjet-printed dielectric template (IJPDt). Standard small-area OLEDs (4 × 4 mm 2 ) achieved a maximum brightness of 24480 cd m −2 at 10 V and a maximum current efficiency of 17 cd A −1 with a low turn-on voltage of 2.7 V.

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“…The coffee ring effect occurs when the particles of the nonvolatile solute present in the ink pin to the substrate at the edge of the drop, while a capillary flow occurs from the center of the drop toward the edge, transporting the solute. , Several solutions have been found to avoid or control the coffee ring effect: proper choice of the solute particles (i.e., ellipsoidal shape), a bigger dimension of the solute particles, reducing substrate temperature, , use of appropriate additives and surfactants, , and inducing the Marangoni flow, which is driven by an interfacial surface tension gradient caused by the presence of two solvents with different boiling temperatures . In the literature, many works can be found on the inkjet printing of polymeric inks. − Bernasconi et al printed SU8-based inks on a Si wafer substrate. They were able to print complex patterns to be used as masks for metal electrodeposition.…”

Section: Introductionmentioning

confidence: 99%

Inkjet Printing of a Benzocyclobutene-Based Polymer as a Low-k Material for Electronic Applications

et al. 2021

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Polymeric materials with a low dielectric constant are widely used in the electronic industry due to their properties. In particular, polymer adhesives can be used in many applications such as wafer bonding and three-dimensional integration. Benzocyclobutene (BCB) is a very interesting material thanks to its excellent bonding behavior and dielectric properties. Usually, BCB is applied by spin-coating, although this technology does not allow the fabrication of complex patterns. To obtain complex patterns, it is necessary to use a printing technology, such as inkjet printing. However, inkjet printing of BCB-based inks has not yet been investigated. Here, we show the feasibility of printing complex patterns with a BCBbased ink, reaching a resolution of 130 μm. We demonstrate that with a proper dilution, BCB-based inks enter the printability window and drop ejection is achieved without the formation of satellite drops. In addition, we present the conditions in which there is an appearance of the coffee ring effect. Inks that feature a too high interaction with the substrate are more likely to show the coffee ring effect, deteriorating the printing quality. We also observe that it is possible to achieve a better film uniformity by increasing the number of printed layers, due to redissolution of the BCB-based polymer that helps to level possible inhomogeneities. Our work represents the starting point for an in-depth study of BCB-based polymer fabrication using jet printing technologies, as a comparison of the bonding quality obtained with different materials and different technologies could give more information and broaden the perspective regarding this field.

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Direct Fabrication of Inkjet-Printed Dielectric Film for Metal–Insulator–Metal Capacitors

Cited by 4 publications

References 19 publications

Reactive Sputtered Silicon Nitride as an Alternative Passivation Layer for Microelectrode Arrays in Sensitive Bioimpedimetric Cell Monitoring

Reactive Sputtered Silicon Nitride as an Alternative Passivation Layer for Microelectrode Arrays in Sensitive Bioimpedimetric Cell Monitoring

Single-Step Inkjet-Printed Dielectric Template for Large Area Flexible Signage and Low-Information Displays

Inkjet Printing of a Benzocyclobutene-Based Polymer as a Low-k Material for Electronic Applications

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