2019
DOI: 10.1002/adom.201900652
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Direct Imprint of Optical Functionalities on Free‐Form Chalcogenide Glasses

Abstract: Scalable surface patterning of chalcogenide glasses is the crux for many optical applications of these promising optical materials. Here, a novel, resist‐free surface patterning of chalcogenide glasses with 3D relief microstructures is introduced, using direct radiation‐assisted thermal imprint. The imprint is based on a nanocomposite mold made of a carbon nanotube matrix and polydimethylsiloxane resin. To allow nanoimprint, the mold and glass substrate are confined between two elastic membranes, pneumatically… Show more

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Cited by 23 publications
(12 citation statements)
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“…We believed that the successful rapid imprinting indicates that our proposed fabrication method was minimally dependent on feature size when using laser assisted imprinting. To achieve complete pattern transfer employing conventional glass thermal imprinting, optimization of temperature, pressure, and holding time are highly dependent on pattern size (thus the line width, and the duty and aspect ratios ) It should be noted that the total cycle time for thermal imprinting previously demonstrated in the literature are generally more than 15 minutes [18,21,22].The data imply that the method could be used to imprint even smaller nanoscale patterns of higher aspect ratio; this is a task for the future. journal.ump.edu.my/jmmst ◄…”
Section: Imprinted Pattern Qualitymentioning
confidence: 99%
“…We believed that the successful rapid imprinting indicates that our proposed fabrication method was minimally dependent on feature size when using laser assisted imprinting. To achieve complete pattern transfer employing conventional glass thermal imprinting, optimization of temperature, pressure, and holding time are highly dependent on pattern size (thus the line width, and the duty and aspect ratios ) It should be noted that the total cycle time for thermal imprinting previously demonstrated in the literature are generally more than 15 minutes [18,21,22].The data imply that the method could be used to imprint even smaller nanoscale patterns of higher aspect ratio; this is a task for the future. journal.ump.edu.my/jmmst ◄…”
Section: Imprinted Pattern Qualitymentioning
confidence: 99%
“…% [22], accessing the super-cooled liquid state where the glass malleable, which is convenient and easily achieved with conventional heating elements. For this reason thermal nanoimprinting has been applied in the fabrication of various photonic devices, including planar waveguides [23], diffraction gratings [24], and ring resonators [25].…”
Section: Introductionmentioning
confidence: 99%
“…Inkjet printing technologies is a popular exible fabrication method of microlens array, but the structures of the microlens are limited to spherical and aspheric shapes [16]. Other sophisticated technologies, including photolithography, e-beam lithography and wet-etching process [17][18], are good at creating complex features with high precision. But their process is extremely complex and costly.…”
Section: Introductionmentioning
confidence: 99%