Direct patterning of Si(001) surfaces by atomic manipulation

Salling, C. T.

doi:10.1116/1.589089

Cited by 12 publications

(4 citation statements)

References 15 publications

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“…Vertical processes involve atom transfers between the tip and the surface, voltage pulse or direct tip-surface contact being used for the atom transfers. Adsorbates or native surface atoms can be either permanently extracted by the tip 11,12,13,14,15,16,17,18,19,20,21,22 or redeposited in another location 23,24,25,26 . This mode has been theoretically studied by several groups 27,28,29,30,31,32,33 .…”

Section: Introductionmentioning

confidence: 99%

Theory of single atom manipulation with a scanning probe tip: Force signatures, constant-height, and constant-force scans

Pizzagalli

Baratoff

2003

Phys. Rev. B

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We report theoretical results predicting the atomic manipulation of a silver atom on a Si(001) surface by a scanning probe tip, and providing several new insights about the manipulation phenomena. A molecular mechanics technique has been used, the system being described by a quantum chemistry method for the short-range interactions and an analytical model for the long-range ones. Taking into account several shapes, orientations, and chemical natures of the scanning tip, we observed four different ways to manipulate the deposited atom in a constant-height mode. In particular, the manipulation is predicted to be possible with a Si(111) tip for different tip shapes and adatom locations on the silicon surface. The calculation of the forces during the manipulation revealed that specific variations can be associated with each kind of process. These force signatures, like the tip height signatures observed in STM experiments, could be used to deduce the process involved in an experiment. Finally, we present preliminary results about the manipulation in constant-force mode.

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Section: Introductionmentioning

confidence: 99%

Theory of single atom manipulation with a scanning probe tip: Force signatures, constant-height, and constant-force scans

Pizzagalli

Baratoff

2003

Phys. Rev. B

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“…Possibly the first (and most highly publicized) application of atomic manipulation enabled the precise positioning of individual xenon atoms on a (110) nickel surface to create the letters 'IBM', again in UHV and cooled to 4 K [13]. This process was also applied to semiconductors, and individual silicon atoms could be removed from and deposited on a Si(111)-7x7 surface [14], and individual dimers moved or 3 nm wide trenches created on Si(100) surfaces [15]. A variety of recent developments in technique may be found in [16].…”

Section: Requirements For Nanomanipulationmentioning

confidence: 99%

Can charge writing aid nanotechnological manipulation?

Wright

Chetwynd

1998

Nanotechnology

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Significant progress in the examination or manipulation of submicrometre particles and large molecules is likely to be dependent upon a suitable method in locating and orienting them onto working substrates. Ideally this would be a general purpose tool that allowed local programming to attract selectively species of interest. Charge writing onto electrets with a scanning-probe microscope offers one possible method. Here the use of this technique for memory applications (the only significant body of research) is examined in order to judge the feasibility of using it with different operational parameters for 'electrostatic clamping'. Until recently it was not regarded as practicable, but new materials developments, especially oxide-nitride-oxide-silicon electrets, show considerably more promise. A clear answer to our question cannot yet be given, but further investigations are suggested and recommended.

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“…They can modify surfaces and structures at the nanometer scale. For example, a scanning tunneling microscope (STM) can draw lines on a hydrogen-passivated silicon surface by hydrogen removal, and can deposit gold dots or lines on a surface; see, e.g., the book by Wiesendanger (1994) and article by Salling (1996) for reviews of some of this work, which has been able to produce features that range from a few to hundreds of nanome-ters. Also, recently a "desktop factory" has been proposed for producing integrated circuits by STM-induced material deposition (Tabib-Azar and Litt 1997).…”

Section: Introductionmentioning

confidence: 99%

Massively Parallel Nanorobotics for Lithography and Data Storage

Requicha

1999

The International Journal of Robotics Research

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Nanometer-scale structures and devices can be constructed by using the tip of a scanning probe microscope (SPM) as a robot. The tip manipulates nanocomponents to build assemblies, or induces material deposition to form patterns on a substrate. Fabrication by SPM methods has severe throughput problems, which can be solved by using arrays of tips built by MEMS (MicroElectroMechanical Systems) technology, in conjunction with the strategies and algorithms presented in this paper. Massively parallel methods are described here for writing and reading nanometer-scale patterns of lines or dots, or for manipulating nanoparticles with arrays of SPM tips. The tip array moves as a whole in the x, y plane of the substrate, and does not require individual x, y drives and controllers for the individual tips. Applications to nanolithography are discussed, as well as a microelectromechanical storage device, analogous to a compact disc (CD) on a chip, and called an editable nanoCD. NanoCDs can be read and edited by the tip-array methods presented here, and have bit densities and reading speeds that are several orders of magnitude higher than those of current CDs.

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Direct patterning of Si(001) surfaces by atomic manipulation

Cited by 12 publications

References 15 publications

Theory of single atom manipulation with a scanning probe tip: Force signatures, constant-height, and constant-force scans

Theory of single atom manipulation with a scanning probe tip: Force signatures, constant-height, and constant-force scans

Can charge writing aid nanotechnological manipulation?

Massively Parallel Nanorobotics for Lithography and Data Storage

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