2005
DOI: 10.1103/physreve.72.061604
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Discrete model for laser driven etching and microstructuring of metallic surfaces

Abstract: We present a unidimensional discrete solid-on-solid model evolving in time using a kinetic Monte Carlo method to simulate microstructuring of kerfs on metallic surfaces by means of laser-induced jet-chemical etching. The precise control of the passivation layer achieved by this technique is responsible for the high resolution of the structures. However, within a certain range of experimental parameters, the microstructuring of kerfs on stainless steel surfaces with a solution of H3PO4 shows periodic ripples, w… Show more

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Cited by 11 publications
(8 citation statements)
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“…Actually, this energy deposition rule has been extended even to MC studies of different physical processes, such as e.g. laser induced jet chemical etching [118]. Nevertheless, other MC models do consider more microscopic (albeit still approximate) rules for erosion, such as the binary collision approximation similar to that employed in SRIM simulations [200,201], as done in the works by Koponen and collaborators [96,97,98,99,100].…”
Section: Monte Carlo Type Modelsmentioning
confidence: 99%
“…Actually, this energy deposition rule has been extended even to MC studies of different physical processes, such as e.g. laser induced jet chemical etching [118]. Nevertheless, other MC models do consider more microscopic (albeit still approximate) rules for erosion, such as the binary collision approximation similar to that employed in SRIM simulations [200,201], as done in the works by Koponen and collaborators [96,97,98,99,100].…”
Section: Monte Carlo Type Modelsmentioning
confidence: 99%
“…Due to the favorable charge-to-mass ratio, hydrocarbon ions resulting from surface impurities are the first to be accelerated, followed, at a later time, by ions of the solid itself. These ions expand into the surrounding medium in the form of a rarefaction wave [8][9][10][11], which is characterized by decreasing density and increasing velocity as it moves further from the source. Meanwhile, xrays emanating from the laser interaction point induce photoionization of the low-density gas embedding the target.…”
Section: Introductionmentioning
confidence: 99%
“…The forward process model is based on the analysis of cause-effect relations between the process parameters and the removal rate. Due to its complex and partly unknown performance [3], the LCM process is modelled by a Radial Basis Function (RBF) network, which is presented in [10,12]. The input quantities of this model are the four process parameters (p, m, D, Q), resulting in the form variables depth a 1 and width a 2 of the removal cross section as output quantities.…”
Section: Near-process Controller Based On An Inverse Process Modelmentioning
confidence: 99%
“…It realizes a localized material removal in specified areas without microcracks and debris [2]. However, the dynamics of laser energy absorption, heat accumulating, chemical reactions, hydrodynamics, and transport phenomena cause various disturbances during the material removal process [3].…”
Section: Introductionmentioning
confidence: 99%