“…In addition, the parameters of defects were determined: concentration c and average radius R of dislocation loops, the thickness of the absorbing sublayer of DSL t am , the parameter k describing the degree of deformation of the kinematically scattering sublayer of DSL, and the thickness of this sublayer, which was in proportion to k. Also, the profile of 'large' RDDL distribution over the sample depth was ascertained. These results were obtained due to proposed in [10,11] phase-variation conception requiring realization of these variations under the experimental conditions, which ensures the main contribution to the intensities sequentially for each type of defects. Thereby, the contribution from defects of the certain type should exceed the total contribution from other types of defects or be simply the maximum possible.…”