Distribution Coefficient of Boron and Phosphorus in Silicon

Boron segregation control in silicon crystal ingots grown in Czochralski process

“…The square of the correlation coefficient, R 2 , is 0.997 close to unity, which demonstrates a good linear fit to the data. k e ¼ 0:738 AE 0:006 for boron in the silicon melt is in reasonable agreement with other works [9,10], where k e ¼ 0:7 and k e ¼ 0:78 AE 0:03 are reported irrespective of the crystal growth rates. Fig.…”

“…For diffusion system without buoyant convection in zero gravity, Witt et al [8] reported the dramatic increase of the dopant concentration in the axial direction and non-uniform radial distribution in the crystals, compared with results on earth. Ravishankar et al [9] and Huff et al [10] investigated k e of Boron in small amount of melt. They found that k e in ''CZ'' system was different from k e in floating zone system [9], and k e did not change with crystal growth rate [9,10].…”

“…Ravishankar et al [9] and Huff et al [10] investigated k e of Boron in small amount of melt. They found that k e in ''CZ'' system was different from k e in floating zone system [9], and k e did not change with crystal growth rate [9,10]. The brief review of segregation was performed by Hurle and Rudolph [11] and Wang et al [12].…”

Distribution coefficient of boron in Si crystal ingots grown in cusp-magnetic Czochralski process

“…The pulling speeds are varied in the range 0.6570.05 mm/min. k e did not change with crystal growth [16,17].…”

A general method for the calculation of segregation profiles in floating zone grown silicon ingots with non-uniform initial distribution of the solute

“…In order to re-calculate the initial dopant and resistivity distribution in the polysilicon rod, the segregation behavior for non-uniform distributions of the solute has to be known. Though a number of studies have been made to examine the distribution of various chemical elements in silicon [4][5][6][7][8][9][10], unfortunately, common segregation models are based on uniform initial distributions of the solute [1] and, thus, are not applicable for this particular case.…”