2015
DOI: 10.1016/j.ijrmhm.2014.08.005
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DLC coating on a trench-shaped target by bipolar PBII

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Cited by 22 publications
(14 citation statements)
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“…These Raman spectroscopic analysis results also strengthen this conclusion, i.e., the ratio of boron and nitride limits the amount of carbon that can be incorporated into the film. If there is a defect in the film structure, the G peak position and the I(D)/I(G) value increase, whereas FWHM(G) decreases [ 35 , 36 ]. This has also clarified that this Raman parameter shows an opposite tendency when the film quality is improved by the ion assist method [ 37 ] or by increasing the incident energy of ions [ 38 ], i.e., the G peak position and the I(D)/I(G) value decrease, whereas FWHM(G) increases.…”
Section: Resultsmentioning
confidence: 99%
“…These Raman spectroscopic analysis results also strengthen this conclusion, i.e., the ratio of boron and nitride limits the amount of carbon that can be incorporated into the film. If there is a defect in the film structure, the G peak position and the I(D)/I(G) value increase, whereas FWHM(G) decreases [ 35 , 36 ]. This has also clarified that this Raman parameter shows an opposite tendency when the film quality is improved by the ion assist method [ 37 ] or by increasing the incident energy of ions [ 38 ], i.e., the G peak position and the I(D)/I(G) value decrease, whereas FWHM(G) increases.…”
Section: Resultsmentioning
confidence: 99%
“…We take a twostep iterative approach to implement a fast solution to solve Poisson's equation. To this end, we first transform Poisson's equation into a linear system like (5), where K is a global matrix. Then, we use the parallel Krylov subspace (KSP) iterative method [29] from the PETSc library [30] to solve this linear equation.…”
Section: Parallel Solution Of Poisson's Equation In Picmentioning
confidence: 99%
“…We use Dataset 1 to validate our implementation and the other five different datasets for performance tests. The solver converts the number density 5 of realistic particles to the corresponding density of simulation particles using a scaling factor given in Table I. The scaling factor indicates the number of real particles to be represented by a simulation particle.…”
Section: Simulation Setupmentioning
confidence: 99%
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“…Plasma plumes exist widely in aerospace propulsion [1], industrial coating [2,3] and nuclear reactors [4,5] such as plasma thrusters in the aerospace propulsion system [6] and micro-cathode vacuum arc thrusters for microsatellites [7]. In the thruster devices described above, plasma is injected to the environmental medium at an extremely high speed, and a feather-like jet flow called a plume is diffused into the surrounding environment rapidly.…”
Section: Introductionmentioning
confidence: 99%