2019
DOI: 10.1038/s41563-019-0355-y
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Droplet epitaxy of semiconductor nanostructures for quantum photonic devices

Abstract: The long dreamed 'quantum internet' would consist of a network of quantum nodes (solid-state or atomic systems) linked by flying qubits, naturally based on photons, travelling over long distances at the speed of light, with negligible decoherence. A key component is a light source, able to provide single or entangled photon pairs. Among the different platforms, semiconductor quantum dots (QDs) are very attractive, as they can be integrated with other photonic and electronic components in miniaturized chips. In… Show more

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Cited by 182 publications
(160 citation statements)
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References 157 publications
(313 reference statements)
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“…For this reason, we moved to a more complex approach. The method of choice was a multistep deposition process, following a droplet epitaxy-inspired protocol [12,13], where the group III precursor (normally TMGa, TEGa or TMIn) was injected into the reactor individually, and the resulting surface was then exposed to group V precursor (either AsH 3 or TMSb) for a period of time (minutes) to form crystalline 'seeds' for further, standard epitaxial overgrowth (with group III and V precursor injected simultaneously, see figure 1)…”
Section: Resultsmentioning
confidence: 99%
“…For this reason, we moved to a more complex approach. The method of choice was a multistep deposition process, following a droplet epitaxy-inspired protocol [12,13], where the group III precursor (normally TMGa, TEGa or TMIn) was injected into the reactor individually, and the resulting surface was then exposed to group V precursor (either AsH 3 or TMSb) for a period of time (minutes) to form crystalline 'seeds' for further, standard epitaxial overgrowth (with group III and V precursor injected simultaneously, see figure 1)…”
Section: Resultsmentioning
confidence: 99%
“…GaAs QDs in an AlGaAs matrix can be self-assembled by local droplet etching 8,9 and have a spectrally narrow ensemble 10,11 . They emit at wavelengths between 700 and 800 nm.…”
mentioning
confidence: 99%
“…Therefore, the In droplets on the surface of WS 2 follow the Volmer–Weber (VW) growth mode without the presence of a wetting layer (WL). [ 21,22 ] The subsequent step is the droplet crystallization by annealing in the group‐V As element atmosphere at 300 °C for 600 s. During this step, the As atoms impinge on the liquid metal droplets and are dissolved into them to form crystal InAs nanoislands. Figure 1b displays a typical atomic force microscopy (AFM) image of the as‐grown InAs nanoislands/WS 2 heterostructure.…”
Section: Resultsmentioning
confidence: 99%