2016
DOI: 10.1515/teme-2015-0096
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Drucksensoren aus Zirkonoxid-Keramik mit hochempfindlichen Sensorschichten

Abstract: ZusammenfassungIn diesem Beitrag stellen wir ein neues Konzept zum Aufbau von resistiv arbeitenden Drucksensoren vor. Durch die Entwicklung von hochempfindlichen Funktionsschichten im Verbund mit Sensorkörpern aus der Hochleistungskeramik ZrO

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Cited by 3 publications
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“…These films offer gauge factors of 5 to 12 depending on the metal and carbon composition and the appropriate thermal ageing after thin film deposition (Schultes et al, 2018). For the metalcarbon films, the best results regarding temperature stability are achieved with an alloy composition of 50 wt % of Ni and 50 wt % of Cr, designated as Ni 50 Cr 50 -C : H. The Wheatstone bridge layout was structured by UV-laser ablation, also described in Schultes et al (2015). To realize a good electrical connection for the lead wires and a temperature sensor R temp , the membrane was partially equipped with a further thin film sandwich of NiCr/Ni/Au with a high temperature coefficient of resistance (TCR ≈ 3000 ppm K −1 ).…”
Section: Sensing Element and Housingmentioning
confidence: 99%
“…These films offer gauge factors of 5 to 12 depending on the metal and carbon composition and the appropriate thermal ageing after thin film deposition (Schultes et al, 2018). For the metalcarbon films, the best results regarding temperature stability are achieved with an alloy composition of 50 wt % of Ni and 50 wt % of Cr, designated as Ni 50 Cr 50 -C : H. The Wheatstone bridge layout was structured by UV-laser ablation, also described in Schultes et al (2015). To realize a good electrical connection for the lead wires and a temperature sensor R temp , the membrane was partially equipped with a further thin film sandwich of NiCr/Ni/Au with a high temperature coefficient of resistance (TCR ≈ 3000 ppm K −1 ).…”
Section: Sensing Element and Housingmentioning
confidence: 99%
“…The thin film sensor materials are described elsewhere Schultes et al, 2018;Schwebke et al, 2018). In brief, the backing material of the strain gauges is a 50 µm thick polyimide (PI) foil to ensure a good electrical insulation to the steel.…”
Section: Non-intrusive Force Compression Rodmentioning
confidence: 99%