Dual-Mode micromirrors for Optical Phased Array Applications

Krishnamoorthy, Uma; Li, K.; Yu, Kun-Ming; Lee, D.; Heritage, J. P.; Solgaard, Olav

doi:10.1007/978-3-642-59497-7_298

Cited by 21 publications

(15 citation statements)

References 5 publications

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“…T HE recent focus of the MEMS world on optical applications of micromachined devices has pushed the field out of surface micromachining technology [1]- [7]. This is mainly due to the need for optically very flat and smooth structures, as well as due to the desire for large deflections and large actuation forces available using high aspect-ratio micromachining.…”

Section: Introductionmentioning

confidence: 99%

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Multilevel Beam SOI-MEMS Fabrication and Applications

Milanović

2004

J. Microelectromech. Syst.

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A microfabrication technology has been developed and demonstrated, which enhances the capabilities and applications of high aspect ratio silicon-on-insulator microelectromechanical systems (SOI-MEMS) by enabling additional independent degrees of freedom of operation: both upward and downward vertical pistoning motion as well as bi-directional rotation. This is accomplished by applying multiple-mask high aspect ratio etches from both the front-and back-side of the SOI device layer, forming beams at different levels. The processes utilize four masks, two for front-side and two for back-side etching. As a result, single-crystal silicon beams with four different cross-sections are fabricated, and can be combined to form many additional beam cross-sections. This provides a wide variety of possible mechanical designs that can be optimized for optical and other applications. By this methodology, unique high aspect ratio micromirror devices were demonstrated with fully isolated and accurately self-aligned vertical combdrives in the SOI device layer, with initial combfinger overlap. Examples of fabricated devices are shown with performance summaries.[886]Index Terms-Deep reactive ion etch (DRIE), inductively coupled plasma (ICP) etch, microfabrication, micromirrors, optical MEMS, self-alignment, SOI-MEMS, vertical combdrives.

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Section: Introductionmentioning

confidence: 99%

“…Particularly of interest is providing 1DoF (or single-axis) and 2DoF (two-axis) rotation Manuscript of micromirrors. There is also demand for micromirrors with independently controlled rotation and pistoning motion [7].…”

Section: Introductionmentioning

confidence: 99%

Multilevel Beam SOI-MEMS Fabrication and Applications

Milanović

2004

J. Microelectromech. Syst.

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“…In general, the tilting angles of micromirrors controlled by electrostatic or electromagnetic actuation are small, and to achieve large angles, it is necessary to either apply a large voltage of over several tens or to operate the devices in a resonant mode [4][5][6][7][8][9]. On the other hand, piezoelectric and thermal expansion actuators are known to produce large forces and large displacements [10,11].…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of a twisting-type thermal actuator for micromirrors

Kim

Park

2009

J Mech Sci Technol

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This paper reports the design of a novel twisting-type micromirror actuation system. The actuating mechanism for driving the micromirror combines two paralleled bimorph actuators bending in opposite directions for rotational control of the micromirror. Each actuator is structured by gold and silicon dioxide or nickel and silicon nitride thin films with embedded polysilicon line heaters. With a size of only 15µm in width, 1.3µm in thickness, and 100µm in length, two bimorph actuators can result in a vertical displacement of 25µm at 10 volts dc with the span of 120µm, and thus the micromirror can rotate by angles over 20°, which is a significant improvement, compared to conventional tilting-type micromirrors.

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“…Various dual-mode micromirrors have been reported [6]- [11]. In [8], a dualmode micromirror based on stacked vertical comb drive actuator for optical phased array application is reported. It utilizes two sets of static top layer comb teeth and two sets of static bottom layer comb teeth to activate the micromirror to work in piston or torsional mode.…”

Section: Introductionmentioning

confidence: 99%

MEMS dual-mode electrostatically actuated micromirror

Xiong

Xie

2014

Proceedings of the 2014 Zone 1 Conference of the American Society for Engineering Education

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Micromirrors based on MEMS (Microelectromechanical Systems) technology have been widely used in light display, optical communication and other applications.In this paper, an electrostatically actuated dual-mode micromirror device is proposed. Folded beam structure is used for piston movement and straight beams are used for torsional movement. Two switches connected to bottom aluminum driving electrodes are used to control the working mode of the micromirror. Depending on the need, it can be activated to work in either piston or torsional mode. The working principle of the micromirror is analyzed. Equations are derived to predict the performance of the micromirror in both piston and torsional modes. ANSYS simulation is used to verify the vibrational modes of the dual-mode micromirror. The proposed micromirror integrates both piston and torsional functions in a single device, leading to more flexibility and better efficiency. Keywords -Microelectromechanical Systems (MEMS), Micromirror, Dual-mode, Piston Micromirror, TorsionalMicromirror.

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Dual-Mode micromirrors for Optical Phased Array Applications

Cited by 21 publications

References 5 publications

Multilevel Beam SOI-MEMS Fabrication and Applications

Multilevel Beam SOI-MEMS Fabrication and Applications

Design and analysis of a twisting-type thermal actuator for micromirrors

MEMS dual-mode electrostatically actuated micromirror

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