In many scientific fields there is a high interest to study molecular adsorption processes on surfaces. The adsorbed molecule can have significant impact on the properties of the material under study, for example protein adsorption to inorganic material can enhance its biocompatibility. Attenuated total reflection Fourier-transform infrared (ATR-FTIR) spectroscopy is a suitable method to monitor such adsorption processes close to a surface. In this study, ZnO films were synthesized on silicon ATR substrates via a mild hydrothermal reaction. The films were then characterized by scanning electron microscopy (SEM) and FTIR microscopy. Chemical imaging with FTIR microscopy allowed to analyze the composition of the heterogeneous film samples. ATR-FTIR spectroscopy was then applied to investigate the adsorption properties of the ZnO films. Protein solutions of bovine serum albumine (BSA) were circulated in a closed cycle over the ZnO film and IR spectra were recorded during the adsorption process. A stronger protein adsorption was observed for silicon substrates coated with ZnO than for plain silicon. Furthermore, subsequent flushing with pure water and desorption measurements indicated a stronger protein binding to ZnO than to plain silicon.