Dynamics of MEMS electrostatic driving using a photovoltaic source

Bermejo, Sandra; Castañer, Luís

doi:10.1016/j.sna.2005.02.003

Cited by 18 publications

(14 citation statements)

References 13 publications

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“…Lu and Fedder [5] used a pre-filter in front of the feedback loop to shape the input command. It has been later proven that instability is avoided by a sufficient reduction in the drive voltage to achieve full gap operation [8] and that was also verified when Bermejo and Castaner [1] studied the potential use of a photovoltaic source as direct drive of the micro electrostatic actuator.…”

Section: Introductionmentioning

confidence: 84%

Nonlinear Control Techniques for Micro Electrostatic Actuators in the Presence of Parasitics and Parametric Uncertainties

Salah¹,

Al-Jarrah²,

Tatlıcıoğlu³

2011

Control and Applications

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In this paper, nonlinear control techniques are developed to control parallel-plate micro electrostatic actuators in the presence of parasitics and parametric uncertainties. The movable plate of the micro actuator is actively controlled utilizing the measurements of internal charge and movable plate's displacement. A velocity observer is designed to estimate the velocity of the plate that is needed for the control algorithm since it is difficult to be measured practically. The proposed backstepping nonlinear control strategies are developed based on a Lyapunov-based analysis, which proves that the desired plate's displacement can be obtained accurately. The proposed nonlinear controllers are capable of controlling the movable plate beyond the pull-in limit in the presence of parametric uncertainties. Representative numerical simulations are presented to demonstrate the performance of the developed nonlinear control strategies in accurately tracking desired deflections of the movable plate within the entire capacitive gap. Finally, a comprehensive performance comparison is performed to examine the effectiveness of the control designs.

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Section: Introductionmentioning

confidence: 84%

Nonlinear Control Techniques for Micro Electrostatic Actuators in the Presence of Parasitics and Parametric Uncertainties

Salah¹,

Al-Jarrah²,

Tatlıcıoğlu³

2011

Control and Applications

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“…The authors of [10] presented a solution to extend the working range of parallel-plate electrostatic actuators by employing a bumper structure in the design of two-beam to change the spring constant near the critical point of pull-in. However, It has been proven that instability is avoided by a sufficient reduction in the drive voltage to achieve full gap operation [11] and that was also verified when Bermejo and Castaner [1] studied the potential use of a photovoltaic source as direct drive of the micro electrostatic actuator. The authors of [2] and [9] demonstrated that electrostatic actuators can be driven based on pulsedcurrent drive that requires much less voltage than voltage drive.…”

Section: Introductionmentioning

confidence: 91%

“…where ( ), ( ), ( ) x t x t x t ∈ are the displacement, velocity, and To simplify the system analysis and control design, the MEA's dynamics in (1) and (2) is transformed into normalized coordinates as follows It is also required that the device charge, ( ) Q T , tracks an…”

Section: Micro Actuator Dynamicsmentioning

confidence: 99%

Filter-based control for parallel plate micro electrostatic actuators

Salah

Bayrak

Tatlıcıoğlu

2011

2011 International Conference on Communications, Computing and Control Applications (CCCA)

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Abstract-In this paper, a filter-based nonlinear control strategy for parallel-plate micro electrostatic actuators is designed. The proposed control technique utilizes the measurements of the micro actuator's movable plate displacement and the device internal charge. The information of the micro actuator's movable plate velocity is utilized as well in the control synthesis but since it is difficult to be measured, filtered signals are designed and utilized to facilitate the control development. A Lyapunov-based analysis is presented which proves that a desired time-varying displacement of the micro actuator's movable plate is accurately tracked. The proposed nonlinear controller is capable of controlling the movable plate beyond the pull-in boundary that is one third of the capacitive gap. Representative numerical simulations are introduced to demonstrate the performance of the proposed filter-based nonlinear control strategy in accurately tracking the deflection of the micro electrostatic movable plate within the entire capacitive gap. Finally, a comparison with a standard PID controller is also presented to demonstrate the effectiveness of the proposed control design.

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“…For example, a transimpedance amplifier with a switched capacitor input [7,45], a photovoltaic source and an optocoupler [46] have been used to drive an electrostatic actuator as a charge source.…”

Section: Charge Controlmentioning

confidence: 99%

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

Park

Abdel‐Rahman

2012

Volume 5: 6th International Conference on Micro- And Nanosystems; 17th Design for Manufacturing and the Life Cycle Conference

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Most electrostatic actuators fabricated by MEMS technology require high actuation voltage and suffer from the pull-in phenomenon that limits the operation range. We present an amplitude-modulated resonant drive circuit to drive electrostatic actuators at much lower supply voltage than that of conventional actuators to extend their operation range. Analytical and numerical models facilitate stability analysis of electrostatic actuators coupled with the resonant drive circuit. We study the impact of parasitic capacitance and the quality factor of the resonant drive circuit on the operation range of electrostatic actuators. Furthermore, we present a new method to measure the displacement of electrostatic actuators by sensing the phase delay of the actuation voltage with respect to the input voltage. This measurement method allows us to easily incorporate feedback control into existing electrostatic actuators without any modification to the actuator itself.

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Dynamics of MEMS electrostatic driving using a photovoltaic source

Cited by 18 publications

References 13 publications

Nonlinear Control Techniques for Micro Electrostatic Actuators in the Presence of Parasitics and Parametric Uncertainties

Nonlinear Control Techniques for Micro Electrostatic Actuators in the Presence of Parasitics and Parametric Uncertainties

Filter-based control for parallel plate micro electrostatic actuators

Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit

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