Dynamics of Self-Sustaining Crystallization of Amorphous Silicon Layers

Abstract

Explosive" or self-sustaining crystallization (SSC) of amorphous silicon films is studied by numerical calculations based on the diffusion equation for heat transport, cast in a finite-difference form. Crystallization of amorphous Si goes on through the metastable undercooled liquid. A Iiquid zone is included between the crystalline and amorphous regions. Crystallization is sustained by the releasing heat due to the difference between the enthalpies of crystalline and amorphous Si.