ECR-assisted MBE growth of In1−Ga N heteroepitaxial films on Si

Yodo, Tokuo; Kitayama, Yasunobu; Miyaki, Kazunari; Yona, Hiroaki; Harada, Yoshio

doi:10.1016/j.spmi.2004.09.012

Cited by 2 publications

(1 citation statement)

References 19 publications

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“…[4][5][6][7] For instance, ECR plasmas are now widely used as reactive gaseous sources in chemical vapor deposition and molecular beam epitaxy for synthesis of thin films and novel materials. 3,[8][9][10][11][12][13] We have combined ECR microwave discharge with pulsed laser ablation and demonstrated a new method for film deposition called ECR plasma-assisted pulsed laser deposition (ECR-PLD). 14,15 In the ECR-PLD method, an ECR plasma is generated by ECR microwave discharge of the working gas, and film deposition is performed by reactive PLD in the ECR plasma environment and with the assistance of the ECR plasma.…”

Section: Introductionmentioning

confidence: 99%

Spectroscopic Study on the Enhanced Excitation of an Electron Cyclotron Resonance Nitrogen Plasma by Pulsed Laser Ablation of an Aluminum Target

et al. 2008

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The influence of pulsed laser ablation of an aluminum target on the nitrogen plasma produced by electron cyclotron resonance (ECR) microwave discharge has been studied by optical emission spectroscopy (OES) with time and space resolution. The continuous wave (CW) feature of the optical emissions from the ECR nitrogen plasma turns to vary with time and space due to pulsed laser ablation and the expansion of the ablation-induced aluminum plume in the nitrogen plasma. The optical emissions from the nitrogen plasma increase significantly and the emission intensity of nitrogen molecular ions is observed to be more than 20 times higher with the target being ablated in comparison to the case without target ablation. The comparison of the optical emissions from the nitrogen plasma with those from the aluminum plume indicates that the excitation enhancement of the nitrogen plasma occurs in the region where the aluminum plume is expanding, revealing that the expansion of the aluminum plume leads to the excitation enhancement of the nitrogen plasma. Relevant mechanisms responsible for the excitation enhancement of the nitrogen plasma through hybrid processes of ECR microwave discharge and pulsed laser ablation are also discussed.

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