The electrical and optical properties of silicon nanopillars (Si NPs) are studied. Electron beam lithography and reactive ion etching are used for the formation of ordered Si NP arrays. The Si NPs with a diameter from 60 to 340 nm and a height from 218 to 685 nm are formed. The Si NPs are coated with a TiON x layer with a thickness of 8 nm for chemical and electrical passivation of the surface. Scanning electron microscopy and atomic force microscopy are used to characterize the obtained structures. The Si NP arrays acquire various colors when exposed to "bright field" illumination. The spectra of reflection from the Si NP arrays in the wavelength range 500-1150 nm are obtained.