Effect of annealing on humidity sensing properties of Sm-doped SnO2 thin films

Lakshmi, R. Bakiya; Juliet, A. Vimala

doi:10.1016/j.jmrt.2019.09.057

Cited by 12 publications

(2 citation statements)

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“…In a wide range of applications, combined sensing mechanisms take place. 101 Figure 8A,B illustrates the mechanism of ITO thin film interaction with H 2 O molecules in the context of humidity sensing. The sensitivity of ITO to humidity primarily depends on the low and high reactive humidity levels.…”

Section: Ito Thin Film For Humidity Sensing Applicationsmentioning

confidence: 99%

“…Chemisorption relates to the chemical reaction between water molecules and the material, while physisorption is more related to the physical absorption of water molecules by van der Waals forces. In a wide range of applications, combined sensing mechanisms take place 101 . Figure 8A,B illustrates the mechanism of ITO thin film interaction with H 2 O molecules in the context of humidity sensing.…”

Section: Ito Thin Film For Humidity Sensing Applicationsmentioning

confidence: 99%

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Indium tin oxide thin film preparation and property relationship for humidity sensing: A review

Rajendran,

Prathuru,

Fernandez

et al. 2024

Engineering Reports

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This review aims to present a critical overview of indium tin oxide (ITO) thin film preparation methods, structure–property relationship, and its humidity sensing. A range of passive and active humidity sensors with thin films (based on metal oxides) detects humidity. ITO thin film has advantageous properties, such as low resistivity and high stability, making it highly suitable for humidity sensing applications. ITO thin film has shown the efficient level of humidity sensing, and a compatible size of humidity sensor can monitor the interface conditions humidity. So far, the application of ITO thin film for humidity measurement has yet to be explored at commercial scale, specifically in the detection of lower environmental humidity range (below 5% relative humidity (RH)). The research reveals a gap in improving the ITO thin film properties with an optimal range of preparation conditions. The research opportunities in the preparation, properties, characteristics, and efficient humidity sensitivity of ITO thin film are reviewed in this work.

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Section: Ito Thin Film For Humidity Sensing Applicationsmentioning

confidence: 99%

Section: Ito Thin Film For Humidity Sensing Applicationsmentioning

confidence: 99%