Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD

Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system

“…Besides, other deposition conditions are also important such as RF power, DC bias and total working pressure. The effect of total working pressure on the structure and properties of the a-CN:H films has been reported in our previous work [21]. The details of RF power and DC bias will be dealt with elsewhere.…”

“…With increasing the N 2 /CH 4 flow ratio, the more nitrogen atoms substitute for carbon sites, which results in the increase of the graphite-like sp 2 the higher N 2 flow, the intense nitrogen ion sputtering at growing film surfaces makes the films looser. Besides, the change of the hardness of the deposited films is relate to the hydrogen content inside the a-CN:H films [21]. In the experiment, the substrate was not heated, and there exists hydrogen inside the films, so the deposited films became softer with increasing N 2 /CH 4 flow ratio, that is another reason for the films changing softer.…”

“…Accordingly, a series of a-CN:H films were prepared at different N 2 /CH 4 gas flow ratios making use of DC-RF-PECVD, which had the flexibility to qualitatively control the ion current density and ion kinetic energy by adjusting the ion current and DC current, respectively [21]. This paper deals with the composition, microstructure, and mechanical properties of the resulting a-CN:H films.…”

Structure and Friction Behavior of CrNx/a-C:H Nanocomposite Films

“…For the samples prepared at mixed CH 4 and N 2 gas atmosphere, the N 1s peak could be reconstructed by three peaks at 400.2 eV, 398.6 eV, and 396.2 eV. The binding energy of 398.6 eV and 400.2 eV is attributed to nitrogen atoms bonded sp 3 C (sp 3 C-N) and sp 2 C (sp 2 C-N) atoms [22], but the difference will not be discussed here. We consider these two binding energies as C-N bonding state.…”

Kesan Kuasa Frekuensi Radio terhadap Komposisi Ikatan Kimia Filem Nipis a-CNx sebagai Pengesan Kelembapan

“…Pecahan ikatan sp 3 C berkurang apabila kuasa RF bertambah. Hal ini adalah disebabkan rangkaian C-C berubah daripada sp 3 C-C kepada sp 2 C -C seperti yang dinyatakan oleh Robertson (1997 (Hao et al 2005). Maka, berlaku peningkatan kadar pemendapan.…”