2007
DOI: 10.1063/1.2730748
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Effect of gate-source and gate-drain Si3N4 passivation on current collapse in AlGaN∕GaN high-electron-mobility transistors on silicon

Abstract: Articles you may be interested inHigh breakdown voltage in AlN/GaN metal-insulator-semiconductor high-electron-mobility transistors

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Cited by 45 publications
(30 citation statements)
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“…While, consistent with the "virtual gate" model, most of the attention has been given to the drain-gate surface area, there are studies [53]- [55] indicating that the source-gate surface may be equally important when it comes to current collapse. For sure, off-state bias and stress conditions, as well as the negative cycle of the RF input signal, may cause relatively large reverse bias on the gate-source junction and non-negligible leakage currents interacting with surface states.…”
Section: E the Effect Of The Source-gate Regionmentioning
confidence: 92%
“…While, consistent with the "virtual gate" model, most of the attention has been given to the drain-gate surface area, there are studies [53]- [55] indicating that the source-gate surface may be equally important when it comes to current collapse. For sure, off-state bias and stress conditions, as well as the negative cycle of the RF input signal, may cause relatively large reverse bias on the gate-source junction and non-negligible leakage currents interacting with surface states.…”
Section: E the Effect Of The Source-gate Regionmentioning
confidence: 92%
“…Silicon nitride ( SiN x ) is the most popular passivating dielectric used in HEMT technology and always receives the greatest attention, due to its full compatibility with Si technology. In addition, it resulted better than other common dielectrics like SiO 2 . Plasma enhanced chemical vapor deposition (PECVD) is a suitable method to deposit SiN layers on GaN HEMTs , due to its relatively low thermal budget (<400 °C), which can guarantee the stability of Ohmic contacts and implanted isolation regions.…”
Section: Algan/gan Hemtsmentioning
confidence: 99%
“…In recent years, heterojunction devices have provided better performance than MESFETs [4], which in the past were the most popular highfrequency and low-noise devices. The superior performance of the AlGaN/GaN HEMTs have been demonstrated to be ten times greater output power density than that of the conventional AlGaAs/GaAs HEMTs [5]- [6] due to the high field strength of nitride semiconductors and the polarizationeffect-induced high-density high-mobility 2-D electron gas (2DEG) [7]. Previously, double-channel HEMTs (DCHEMTs) have been employed in order to increase the saturation current level and output power [8]- [10].…”
Section: Introductionmentioning
confidence: 97%